Non-volatile semiconductor memory and method of making same, and semiconductor device and method of making device

ABSTRACT

A semiconductor device, which ensures device reliability especially in fine regions and enables great capacitance and high-speed operations, has memory cells including, in a first region of a main surface of a semiconductor substrate, a gate insulating film, a floating gate electrode, an interlayer insulating film, a control gate electrode, and source and drain regions of the second conduction type arranged in a matrix, with a shallow isolation structure for isolating the memory cells. When using a shallow structure buried with an insulating film for element isolation, the isolation withstand voltage in fine regions can be prevented from lowering and the variation in threshold level of selective transistors can be reduced. When the memory cells in a memory mat are divided by means of selective transistors, the disturb resistance of the memory cells can be improved.

This application is a Divisional application of application Ser. No.10/851,350, filed May 24, 2004, which is a Continuation application ofapplication Ser. No. 10/374,433, filed Feb. 27, 2003 now abandoned,which is a Continuation application of application Ser. No. 10/173,158,filed Jun. 18, 2002, now abandoned, which is a Continuation applicationof application Ser. No. 10/011,731, filed Dec. 11, 2001, now U.S. Pat.No. 6,444,554, issued Sep. 3, 2002, which is a Continuation applicationof application Ser. No. 09/402,078, filed Feb. 7, 2000, now U.S. Pat.No. 6,461,916, issued Oct. 8, 2002, the entire disclosure of Ser. No.09/402,078 being incorporated herein by reference. Ser. No. 09/402,078is a National Stage application filed under 35 USC § 371 ofInternational (PCT) Patent Application No. PCT/JP98/00710, filed Feb.20, 1998.

TECHNICAL FIELD

This invention relates to a semiconductor device and also to a methodfor fabricating that semiconductor device; and, more particularly, theinvention relates to a technique which is effective when applied tofineness and mass storage of a non-volatile semiconductor memory.

BACKGROUND OF THE INVENTION

There is an electrically rewritable non-volatile semiconductor storageknown as a so-called AND-type flash memory, which is sot out, forexample, in Japanese Laid-open Patent Application No. Hei 07-273231. Inthat publication, the following fabrication method is described as atechnique for improving the degree of integration of transistors calledmemory cells, existing in a chip.

More particularly, a three-layered built-up film, consisting of a gateoxide film, a first polysilicon layer and a silicon nitride film, isdeposited on a semiconductor substrate made of single crystal silicon,and this is followed by patterning the built-up film in the form ofstripes. Next, n-type impurity ions are implanted into the semiconductorsubstrate at portions which have not been covered with the patternedbuilt-up film to form column lines of an n-type impurity semiconductorregion in the surface of the semiconductor substrate. Thereafter, afterdeposition of an oxide film by CVD (Chemical Vapor Deposition), thesilicon oxide film formed by the CVD method is etched by anisotropic dryetching to form a side wall spacer on the side walls of the firstpolysilicon layer and silicon nitride film. Using the first polysiliconlayer and the side wall spacers as a mask, grooves are formed in thesemiconductor substrate by anisotropic dry etching. In this manner, then-type impurity semiconductor region is isolated, thereby forming columnlines and source lines, respectively. Next, after formation of a siliconoxide film on the surface of the grooves, a second polysilicon layer isattached (deposited) over the entire surface of the semiconductorsubstrate, and this is followed by etching back the second polysiliconlayer by isotropic dry etching until the silicon nitride film isexposed. The surface of the etched-back second polysilicon layer isoxidized to form an element isolation region made of the polysiliconcovered with the silicon oxide film. Subsequently, the silicon nitridesfilm is removed, and a third polysilicon layer is further attached andsubjected to patterning so as to protect the first polysilicon layertherewith, thereby forming floating gates in parallel with the columnlines. Thereafter, an interlayer insulating film and a fourthpolysilicon layer are attached, and this is followed by patterning toform column lines made of the fourth polysilicon layer and disposed soas to be vertical to the column lines. Eventually, the first and thirdpolysilicon layers are mutually isolated from each other to formfloating gates.

In the AND-type flash memory formed in this way, electrons are stored inthe floating gate to constitute a semiconductor device having anon-volatile memory function. Especially, the n-type impuritysemiconductor region, which is formed with the first polysilicon layerat opposite sides thereof, serves as a source or drain region. In themethod set out above, the processing of the first polysilicon layer andthe formation of the element isolation region are performed by use of aone-layer mask pattern, so that no alignment allowance for the gate andthe element isolation region is necessary, thereby enabling one toreduce a cell area.

In Japanese-Laid-open Patent Application No. Hei 06-77437, there isdescribed a technique concerning a working system of a non-volatilesemiconductor memory. In the non-volatile semiconductor memory set forthin that publication, when electrons are released from a floating gate towrite data in a memory cell, a negative voltage is applied to a controlgate electrode, while a positive voltage or zero voltage is applied to adrain terminal, thereby describing a technique for selective writing ofthe data.

Moreover, in Japanese Laid-open Patent Application No. Hei 08-107158,there is described a technique concerning high-speed reading and writingof a non-volatile semiconductor memory. The non-volatile semiconductormemory set out in that publication is fabricated by forming an elementisolation region according to the LOCOS (Local Oxidation of Silicon)method by forming a first floating gate electrode (lower layer), andsource and drain regions, covering the first floating gate electrodewith an interlayer insulating film, removing the insulating film by anetching-back method or the CMP (Chemical Mechanical Polishing) method,and forming a second floating gate electrode (upper layer) on the firstfloating gate electrode.

In Japanese Laid-open Patent-Application No. Hei 08-148658, there isdescribed a technique concerning a fabrication method suited for a highdegree of integration of a non-volatile semiconductor memory. Thenon-volatile semiconductor memory set out in that publication isfabricated by patterning a polysilicon layer for floating gates, andforming a polysilicon layer for use as gate electrodes of a peripheralcircuit and an insulating film so as to permit them to run on thepatterned layer.

SUMMARY OF THE INVENTION

However, we have found that the above-stated techniques present thefollowing problems.

-   1. In the operation of electron withdrawal using the drain terminal,    it is necessary to overlap the drain region and the floating gate.    Accordingly, the gate length of the memory cell could not be    shortened, making it difficult to achieve an intended cell fineness.-   2. As a procedure for establishing isolation of memory cells,    thermal oxidation is used, so that an excess thermal treating step    was added after the formation of a gate oxide film, which made it    difficult to ensure the reliability of the gate oxide film.    Moreover, it was also difficult to suppress the elongation of the    impurity semiconductor region caused during the thermal treating    step.-   3. A grooved structure is used as a method of forming an isolation    region of the memory cells. The polysilicon layer is used as a    burying material, so that a difficulty arose concerning the high    withstand voltage isolation between the cells.-   4. In non-volatile semiconductor memories, such as the AND-type    memory flash memories proposed in the above-described techniques, no    method of forming memory cells and MOS transistors serving as    peripheral circuits and arranged on the same semiconductor substrate    is disclosed at all. The fineness of memory cells proceeds through    the development of processing techniques. However, a high voltage is    used for write and erase operations, and thus, transistors for    peripheral circuits are required to have such a specification as to    withstand high voltages. For instance, in the fabrication method    wherein an impurity semiconductor region of an MOS    (Metal-Oxide-Semiconductor) transistor of a peripheral circuit is    formed after formation of memory cells, it is difficult to form, on    the same substrate, memory cells which should be a shallow junction    impurity semiconductor region and the MOS transistor of the    peripheral circuit which should have a deep junction structure. More    particularly, the impurity semiconductor region of the memory cell    should have a shallow junction so as to prevent punch through. On    the other hand, the impurity semiconductor region of the high    withstand voltage MOS transistor existing in a peripheral circuit    permits field relaxation at the junction portion through an    annealing step in order to ensure a high withstand voltage. After    the formation of the memory cells, if a transistor of the peripheral    circuit is formed, an additional annealing step is added to    formation of the memory cells. As a result, the punch through    resistance is lowered, making it impossible to assure the operation    of the transistor having a short gate length.-   5. In non-volatile semiconductor memories, such as AND-type flash    memories, an MOS transistor for memory cell selection is arranged in    a memory mat, but its formation method is not described. On the    other hand, with regard to write and erase voltages, the use of a    low voltage accompanied by fineness is not available, but operations    at a high voltage are required. Accordingly, for the isolation    between memory cells and selective transistor units, it is necessary    to ensure the isolation withstand voltage.-   6. In non-volatile semiconductor memories, including AND-type flash    memories, an interlayer insulating film and a control gate electrode    material are deposited on the floating gate electrode, and this is    followed by processing of a word line electrode (control gate    electrode) by photolithography and an etching process. When an    electrode pattern is transferred to a photoresist, a halation    phenomenon takes place due to the step with the underlying floating    gate electrode, thereby causing the pattern form of the photoresist    to be partially deformed. According to the fabrication methods of    the afore-discussed applications (Japanese Laid-open Patent Nos. Hei    08-107158 and Hei 08-148658), it is possible to some extent to    suppress such halation. However, the impartment of a high withstand    voltage to the element isolation region is difficult when using    these fabrication methods.

An object of the invention is to provide non-volatile semiconductormemory having a structure which is suited for a high degree ofintegration and its fabrication technique.

Another object of the invention is to increase a memory capacity of anon-volatile semiconductor memory.

A further object of the invention is to provide an operation system of atransistor which enables one to make the gate length of a memory cell asshort as possible.

Still another object of the invention is to provide a technique forensuring reliability of a gate insulating film and for suppressingelongation of an impurity semiconductor region without need of a thermaltreatment for the formation of element isolation regions at hightemperatures.

Yet another object of the invention is to provide a technique forrealizing a high withstand voltage of element isolation regions.

Still another object of the invention is to provide a technique not onlyof ensuring a high withstand voltage of element isolation regions, butalso of realizing a high degree of integration.

Yet another object of the invention is to provide a non-volatilesemiconductor memory having a structure which permits high withstandvoltage MOS transistors and fine memory cells to be arranged within thesame chip and is able to realize the junction of impurity semiconductorregions required for individual transistors and also its fabricationmethod.

Still a further object of the invention is to provide a technique forreducing, in size, a selective transistor of a memory cell.

Still another object of the invention is to provide a technique forsuppressing the halation of exposure light when control gate electrodesof memory cells are patterned.

In the Technical Digest, pp. 61 to 64 of IEDM, 1994, there is describeda technique for isolating semiconductor non-volatile elementstherebetween by use of grooves formed in a silicon substrate. Inaccordance with this technique, mention is made, as a filling materialfor filling the grooves between the elements, of a deposited siliconoxide film (“LP-CVD film” in this literature). The semiconductornon-volatile element consists of a first gate electrode surrounded by aninsulating film and a second gate electrode positioned just thereabove.

As stated in the literature, the second gate electrode has to be formedwhile reflecting the step formed with the first gate electrode. Moreparticularly, processing should be performed while taking into accountthe difference in height between the upper portion of the firstelectrode and that electrode. This step may invite a failure indissolution of photolithography when the second gate electrode isprocessed, or short-circuiting of adjacent patterns owing to a dryetching failure. Studies has been made in order to reduce the step to anextent as small as possible. Although it appears that planarizationbetween the elements can be realized according to the method describedin the literature, the lines of juncture do not completely disappear,since an ordinary deposited oxide film is used for filling in betweenthe elements. The juncture lines are liable to be opened when washed ordry-etched, and once a reduced difference in height appears again, a dryetching failure tends to occur.

To avoid such a phenomenon there is a method using a filling material inwhich no juncture line remains. The most popular fluid silicon oxidefilm is called boron phosphosilicate glass (hereinafter abbreviated asBPSG), which contains very high concentrations of boron and phosphorus.When thermally treated at approximately 850° C., BPSG has the propertyof exhibiting high fluidity. This is one of the materials which issuitable for reducing a difference in height of a fine width. However,the solubility in hydrofluoric acid, which is used in a cleaning stepthat is essential for the manufacture of semiconductor devices, isgreater by several times than that of a non-doped silicon oxide film.Accordingly, BPSG, which is employed for filling between the elementsand planarization undergoes considerable attack during the cleaningprocess, thereby causing a great difference in height once again.

Still another object of the invention is to provide a techniques forsolving the step problem wherein there is used a material having anetching resistance sufficient to permit hydrofluoric acid to be employedin a cleaning step.

The above and other objects, and novel features of the invention willbecome apparent from the description in the present specification andfrom the accompanying drawings.

Among the features disclosed in the present application, the outlines oftypical ones are briefly described as follows.

In order to achieve the above objects, the structures of non-volatilesemiconductor memories and their fabrication methods are disclosedbelow.

-   (1) A method of fabricating a semiconductor device according to the    invention comprises the steps of (a) depositing a first conductive    film on a memory cell-forming region and a peripheral circuit region    of a semiconductor substrate, (b) etching the first conductive film    of the memory cell-forming region to form a first conductor    pattern, (c) polishing an insulating film deposited on the first    conductor pattern and the peripheral circuit-forming region to form    a first insulating film on a non-patterned portion of the first    conductor patterns, (d) after the step (c), forming a second    conductor pattern on the first insulating film and the first    conductor pattern; and (e) subjecting the first conductor pattern    and the second conductor pattern to patterning to form a floating    gate electrode of memory cells.

It will be noted that the surface position of the first insulating filmbeneath the second conductor pattern is so arranged as to be higher thanthat of the first conductor pattern.

A method of fabricating a semiconductor device according to theinvention comprises the steps of etching a first conductive film formedon a semiconductor substrate to form a first conductor pattern, (b)polishing an insulating film deposited on the first conductor pattern toform a first insulating film on non-patterned portions of the firstconductor patterns, (c) after the step (b) forming a second conductorpattern on the first insulating film and the first conductor pattern,and (d) patterning the first conductor pattern and the second conductorpattern to form a floating gate electrode of memory cells wherein thesurface position of the first insulating film beneath the secondconductor pattern is so arranged as to be higher than the surfaceposition of the first conductor pattern.

It will be noted that the first conductor pattern is formed bydepositing a second insulating film on the first conductor and etchingthe second insulating film and the first conductive film, and the stepof forming the first insulating film includes, after polishing of theinsulating film, etching the insulating film to the second insulatingfilm.

Moreover, the second insulating film is deposited on the firstconductive film, and the second insulating film and the first conductivefilm are both etched to form the first conductor pattern. In the step offorming the first insulating film, the insulating film is polished tothe second insulating film. It is to be noted that the second insulatingfilm of this case can serve as a stopper layer when polished.

In addition, the method further comprises, prior to the step of formingthe first insulating film, the steps of forming side wall spacers at theside walls of the first conductor pattern, and etching the substrate toself-alignedly form a groove relative to the side wall spacers

-   (2) The semiconductor device of the invention has first MISFET's    which constitute memory cells. The first MISFET's include a first    floating gate electrode formed on a main surface of a semiconductor    substrate through a gate insulating film, a second floating gate    electrode formed on and electrically connected to the first floating    gate electrode, a control gate electrode formed on the second    floating gate electrode through an interlayer insulating-film, and a    pair of semiconductor regions formed within the semiconductor    substrate and serving as source/drain regions, wherein the first    MISFET's are isolated, with a first isolation region, from adjacent    first MISFET's adjoining along a first direction, the insulating    film is so formed that it has a thickness greater than that of the    first floating gate electrode on the first isolation region, the    second floating gate electrode is formed to extend on the insulating    film, and the surface position of the insulating film is higher than    that of the first floating gate electrode.

Further, the semiconductor device of the invention is one which hasfirst MISFET's and second MISFET's. The first MISFET constituting amemory cell includes a floating gate electrode formed on a main surfaceof a semiconductor substrate through a gate insulating film, a controlgate electrode formed on the floating gate electrode through aninterlayer insulating film, and the second MISFET includes a gateelectrode formed on the main surface of the semiconductor substratethrough a gate insulating film. The first MISFET's are arranged in theform of an array, and the first MISFET's are isolated from adjacentfirst MISFET's by means of a first isolation region along a firstdirection, and the surface position of an insulating film formed on thefirst isolation region is substantially uniform between the firstMISFET's arranged in the form of an array and is higher than the surfaceposition of an insulating film formed on a second isolation region.

It will be noted that in the above semiconductor device, the insulatingfilm is buried between the side wall spacers formed on the side walls ofthe first floating gate, and a semiconductor region is formed below theside wall spacers.

In the semiconductor device, the first isolation region has such astructure that the insulating film is buried in the groove of thesemiconductor substrate, which is formed self-alignedly to the side wallspacers formed on the side surfaces of the first floating electrodes.

Moreover, in the semiconductor device, one of the paired semiconductorregions serving as the source/drain regions of the second MISFET iselectrically connected to the semiconductor region of the first MISFET,and the second MISFET's are isolated from each other by means of asecond isolation region, and the first and second isolation regions havesuch a structure that an insulating film is buried in grooves of thesemiconductor substrate which are formed self-alignedly to the side wallspacers formed on the side surfaces of the first floating gate electrodeand the gate electrode of the second MISFET.

In the semiconductor device, the gate electrode of the second MISFET ismade of materials which constitute, at least, the first floating gateelectrode, second floating electrode and control gate electrode, and thesecond floating electrode and the control gate electrode areelectrically connected. In this connection, the second floating gateelectrode and the control gate electrode may be connected via an openingformed in the interlayer insulating film.

Furthermore, the semiconductor device of the invention is one which hasfirst MISFET's constituting memory cells and second MISFET's. The firstMISFET constituting a memory cell includes a first floating electrodeformed on a main surface of a semiconductor substrate through a gateinsulating film, a second floating gate electrode formed on andelectrically connected to the first gate electrode, a control gateelectrode formed on the second floating gate electrode through aninterlayer insulating film, and a pair of semiconductor regions formedwithin the semiconductor regions formed within the semiconductorsubstrate and serving as source•drain regions, and the first MISFET isisolated, with a first isolation region, from an adjacent first MISFETadjoining along a first direction. The second MISFET has a first gateregion made of materials which constitute the gate insulating film, thefirst floating gate electrode, the second floating gate electrode, theinterlayer insulating film and the control gate electrode, and a secondgate region made of materials which constitute the interlayer insulatingfilm and the control gate electrode, both disposed along the directionof the gate length. The semiconductor region, which acts as one of thesource/drain regions of the second MISFET, is electrically (connected)to one semiconductor region of the first MISFET and is arranged toextend to the lower portion of the first gate region. The channel regionof the second MISFET is formed within the substrate at the lower portionof the second gate region and is formed between the semiconductorregions serving as the source/drain regions of the second MISFET. Inthis case, the control gate electrode of the first MISFET is formedintegrally with a word line formed to extend in the first direction, andthe one of semiconductor regions of the second MISFET is formedintegrally with one of semiconductor regions of a first MISFET providedadjacently to a second direction which is, vertical to the firstdirection, and the other semiconductor region of the second MISFET maybe electrically connected to a data line.

Further, the semiconductor device of the invention is one which hasfirst MISFET's constituting memory cells. The first MIFET includes afirst floating gate electrode formed on a main surface of asemiconductor substrate via a gate insulating film, a control gateelectrode formed on the upper portion of the first floating gateelectrode via an interlayer insulating film, and a pair of semiconductorregions formed within the semiconductor substrate and serving assource/drain regions. The channel region of the first MISFET is arrangedbetween the paired semiconductor regions within the substrate, and thepaired semiconductor regions of the first MISFET are arranged to have asymmetric structure. In this arrangement, information is written anderased by charging and discharging electrons between the entire surfaceof the channel region and the first floating gate electrode by tunnelingthrough the gate insulating film.

In the semiconductor device, for the erase operation wherein electronsare discharged from the first and second floating gate electrodes to thesubstrate by tunneling through the gate insulating film, a first voltageis applied to the control gate electrode, and the semiconductor regionof the first MISFET is set at the same potential as the semiconductorsubstrate portion beneath the first floating gate electrode and is setat a voltage lower than a first voltage.

Moreover, for the write operation in the semiconductor device whereinelectrons are discharged from the substrate to the first floating gateelectrode by tunneling through the gate insulating film, a secondvoltage of a polarity different from that of the first voltage isapplied to the control gate electrode, and the semiconductor region of aselected first MISFET is set at the same potential as the semiconductorsubstrate portion beneath the first floating gate electrode, therebyreversing the channel region. At the same time, a third voltage havingthe same polarity as the second voltage is applied to the semiconductorregion of a non-selected first MISFET so that the voltage between thechannel region and the control gate electrode is rendered lower than apotential between the channel region of the selected first MISFET andthe control gate electrode. It should be noted that when the controlgate voltage added as the second voltage has three or more voltagelevels and the change of a threshold value of the first MISFET logicallycorresponds to individual voltage levels on the basis of the differencein charge quantity injected into the floating gate electrodecorresponding to the voltage level, information of two bits or more canbe memorized in one memory cell. Further, for the writing of informationin a memory cell, the information can be written while successivelyshifting from a writing operation at the highest second voltage towriting operations at lower second voltages.

For the read out of information from a memory cell, the information canbe read out while successively shifting from detection of a thresholdvalue corresponding to the quantity of charges injected at the lowestsecond voltage to detection of threshold values corresponding to thequantities of charges injected at higher second voltages.

In the above semiconductor device, the channel region of the firstMISFET may be arranged between the paired semiconductor regions in thesecond direction vertical to the first direction.

The channel region of the first MISFET may be arranged between thepaired semiconductor regions in the first direction.

Moreover, in the semiconductor device, the paired semiconductor regionsof the first MISFET may be arranged to have a symmetrical structure.

-   (3) A method of fabricating a semiconductor device according to the    invention which comprises a word line formed to extend in a first    direction, a local data line and a local source line made of a    semiconductor region formed to extend in a second direction with a    semiconductor substrate, and first MISFET's and second MISFET's, the    first MISFET's, which constitute memory cells, including a first    floating gate electrode formed on a main surface of the    semiconductor substrate through a gate insulating film, a second    floating gate electrode formed on and electrically connected to the    first floating gate electrode, a control gate electrode formed on    the second floating electrode through an interlayer insulating film,    and a pair of semiconductor regions formed within the substrate and    serving as source/drain regions, the second MISFET's including a    gate electrode formed on the main surface of the semiconductor    substrate through a gate insulating film and semiconductor regions    formed within the semiconductor substrate, serving as source/drain    regions and electrically connected to one of the semiconductor    regions of the first MISFET's wherein first MISFET's are isolated    such that first MISFET's adjoining in a first direction are    subjected to isolation with a first isolation region and second    MISFET's are subjected to isolation with a second isolation region.    The method comprises the steps of (a) successively depositing a gate    insulating film, a first conductive film and a first insulating film    on a semiconductor substrate and patterning the first insulating    film and the first conductive film in a striped column pattern, (b)    forming a side wall spacer on side walls of the column pattern, (c)    etching the semiconductor substrate self-alignedly to the side wall    spacers to form a groove in the semiconductor substrate, (d)    depositing a second insulating film on the semiconductor substrate    including the inside of the groove and removing the second    insulating film to the level of the first insulating film for    planarization thereby forming first and second isolation    regions, (e) after the step (d), removing the first insulating film    to expose the surface of the first conductive film, (f) forming a    second conductive film in contact with the surface of the first    conductive film to cover the first conductive film in a direction of    extension of the column pattern, and (g) successively depositing an    interlayer insulating film and a third conductive film on the second    conductive film and patterning the third conductive film, the    interlayer insulating film and the first and second conductive films    in a direction vertical to the extending direction of the column    pattern.

The method of fabricating a semiconductor device according to theinvention is used to fabricate a semiconductor device including a firstfloating gate electrode formed on a main surface of a semiconductorsubstrate through a gate insulating film, a second floating gateelectrode formed on and electrically connected to the first floatinggate electrode, a control gate electrode formed on the second floatinggate electrode through an interlayer insulating film, and a pair ofsemiconductor regions formed within the semiconductor substrate andserving as source/drain regions. The method comprises (a) successivelydepositing a gate insulating film, a first conductive film and a firstinsulating film on a semiconductor substrate and patterning the firstinsulating film and the first conductive film in a striped columnpattern, (b) forming a side wall spacer on side walls of the columnpattern, (c) after the step (b), depositing a third insulating film onthe semiconductor substrate, (d) removing the third insulating film tothe first insulating film for planarization, (e) removing the firstinsulating film to expose the surface of the first conductive film andforming a second conductive film in contact with the surface of thefirst conductive film to cover the first conductive film in a directionof extension of the column pattern, and (f) successively depositing aninterlayer insulating film and a third conductive film on the secondconductive film and patterning the third conductive film, the interlayerinsulating, film and the first and second conductive films in adirection vertical to the extending direction of the column pattern.

Further, the method for fabricating a semiconductor device according tothe invention comprises the steps of (a) successively depositing a gateinsulating film, a first conductive film and a first insulating film ona semiconductor substrate and patterning the first insulating film in astriped column pattern, (b) after the step (a), subjecting thesemiconductor substrate to etching self-alignedly to the firstinsulating film to form a groove in the semiconductor substrate, (c)depositing a second insulating film on the semiconductor substrateincluding the groove surface and removing the second insulating film tothe first insulating film for planarization, (d) removing the firstinsulating film to expose the surface of the first conductive film andforming a second conductive film in contact with the surface of thefirst conductive film to cover the first conductive film in a directionof extension of the column pattern, and (e) successively depositing aninterlayer insulating film and a third conductive film on the secondconductive film and patterning the third conductive film, the interlayerinsulating film and the first and second conductive films in a directionvertical to the extending direction of the column pattern.

In the above fabrication method, the first floating gate electrode isconstituted of the first conductive film, the second floating gateelectrode is constituted of the second conductive film, and the gatecontrol electrode is constituted of the third conductive film, and afterthe patterning of the third conductive film, and after of semiconductorregions serving as source/drain regions can be formed.

The surface position of the third insulating film beneath the secondconductive film may be formed at a level which is the same as or higherthan the surface position of the first conductive film.

In the step (d) polishing of the third insulating film ensuresplanarization.

Moreover, the first insulating film can be used as a stopper layer. Inthe step (d), after planarization by polishing of the third insulatingfilm, the third insulating film can be removed by etching to the firstinsulating film.

The patterning of the striped column pattern in the step (a) isperformed with respect to a memory cell forming region in such a waythat other regions have the first conductive film and the firstinsulating film left thereon.

Moreover, a third MISFET is formed wherein semiconductor regions servingas source/drain regions of the third MISFET are formed prior to theformation of a semiconductor region.

The method further comprises the step of forming a first layer wire, andthe first layer wire in a memory cell-forming region is provided in theform of lattices, and an interlayer insulating film between thefirst-layer wire and a second-layer wire formed thereon is planarized bythe CMP method.

Further, the method of fabricating a semiconductor device according tothe invention comprises the steps of (a) depositing a first conductivefilm on a first MISFET-forming region and a second MISFET-forming regionof a semiconductor substrate, (b) etching the first conductive film inthe first MISFET-forming region to form a first conductive pattern, (c)polishing an insulating film deposited on the first conductor patternand the first conductive film of the second MISFET-forming region toform a first insulating film between the first conductor patterns, and(d) after the step (c), removing the first conductive film of the secondMISFET-forming region.

The above fabrication method may further comprise, after the step (d),the step of forming a gate insulating film and a gate electrode in thesecond MISFET region.

The method may further comprise, after the step (c) the step of removinga second conductor pattern on the first insulating film and the firstconductor pattern wherein the first conductor pattern and the secondconductor pattern constitute a floating gate electrode of a memory celland the surface position of the first insulating film beneath the firstconductor pattern is arranged to be higher than the surface position ofthe first conductor pattern.

-   (4) A semiconductor device of the invention is one which has first    MISFET's constituting memory cells. The first MISFET includes a    first floating gate electrode formed on a main surface of a    semiconductors substrate through a gate insulating film, a control    gate electrode formed on the upper portion of the first floating    gate electrode via an interlayer insulating film, a pair of    semiconductor regions formed within the semiconductor substrate and    serving as a source•drain region wherein first MISFET's adjoining in    a first direction are subjected to isolation with a first isolation    region, and the first isolation region has a structure in which an    insulating film is buried in grooves of the semiconductor substrate,    and wherein the surface position of the insulating film is higher    than the main surface of the semiconductor substrate and the channel    region of the first MISFET is positioned between the paired    semiconductor regions in a second direction vertical to the first    direction.

The semiconductor device may be so arranged that a second floating gateelectrode is formed on the upper portion of the first floating gateelectrode and is electrically connected to the first floating gateelectrode, an interlayer insulating film is formed on the secondfloating gate electrode so that the second floating gate electrodeextends over the upper surface of the insulating film, and the uppersurface of the insulating film is made higher than the upper surface ofthe first floating gate electrode.

Moreover, a side wall spacer may be formed on side surfaces of the firstfloating gate electrodes, under which grooves are formed self-alignedlyrelative to the side wall spacers.

Alternatively, the groove may be formed self-alignedly relative to theside surfaces of the first floating gate electrode.

When using the above measures, the objects of the invention can beachieved with the following features.

Firstly, write operation to memory cells and erase operations areperformed through full charge and discharge of electrons via the gateinsulating film provided between the floating gate and the semiconductorsubstrate, so that a conventional overlapped portion of a floating gateelectrode and a drain region becomes unnecessary. This enables one toreduce the area of a memory cell, thus making it possible to achieve ahigh degree of integration of a non-volatile semiconductor memory.

Secondly, memory cells along the direction of a data line can be dividedinto blocks by means of selective transistors. At the time of a writeoperation, selective transistor in a non-selected block are turned off,so that application of an unnecessary data line voltage to memory cellscan be inhibited in the non-selected block. Thus, rewrite ofunintentional information to non-selected memory cells (disturbphenomenon) can be prevented, thus improving the reliability of thenon-volatile semiconductor memory

Thirdly, the isolation region for a memory cell and a selectivetransistor is arranged to have a shallow groove isolation structure, sothat excess thermal hysteresis on the gate oxide film can be preventedand the reliability of an oxide film constituting the gate insulatingfilm can be improved. Moreover, the isolation resistance is alsoimproved.

Fourthly, the impurity semiconductor region of MOS transistors in aperipheral circuit is formed prior to the formation of memory cells.Accordingly, the memory cells do not suffer any thermal hysteresis owingto the formation of the memory cells. Accordingly, the memory peripheralMOS transistors. The impurity semiconductor region of the MOStransistors of the peripheral circuit is formed at adequately hightemperatures, thereby ensuring the formation of a deep junction,enabling one to obtain a structure suitable for transistor operations athigh voltages. On the other hand, the impurity semiconductor region ofthe memory cell is formed with a shallow junction, thereby making itpossible to keep a high resistance to punch through. Such a shallowjunction impurity semiconductor region of the memory cell does notsubsequently undergo excess thermal hysteresis so that excessivediffusion of an impurity does not take place, and thus, a shallowjunction keeps its structure as initially formed.

Fifthly, an underlying layer is flattened prior to the formation of thesecond floating gate electrode, and the processing precision of thesecond floating gate electrode and the word line is improved. Moreparticularly, when the second floating gate electrode is patterned, theunderlying layer is flattened, so that scattering of exposure light,which reflects the irregularities of the underlying layer, does not takeplace. This contributes to the improvement in exposure precision,thereby improving the processing precision of the non-volatilesemiconductor memory to make a high degree of integration easy.

In this application, in order to solve the above problems, there aredisclosed a semiconductor device and a method for making same.

The semiconductor device of the invention comprises a plurality ofsemiconductor elements formed on the same semiconductor substrate, afluid silicon oxide film containing phosphorus or boron, which is filledbetween electrodes of the semiconductor substrate and wherein nitrogenis introduced to the surface of the fluid oxide film.

The electrodes may be provided as a floating gate electrode of asemiconductor non-volatile memory.

The method of fabricating a semiconductor device according to theinvention comprises filling a phosphorus or boron-containing fluidsilicon oxide film between electrodes of a plurality of semiconductorelements formed on the same semiconductor substrate where the electrodesare made of polysilicon, and subjecting the surface of the fluid oxidefilm to thermal treatment in an atmosphere of ammonia.

The electrodes may be provided as a floating gate electrode of asemiconductor non-volatile memory.

In the practice of the invention, in order to improve the resistance toliquid cleaning, BSPG is heated in an atmosphere of ammonia. BSPG isnitrided to a depth of approximately 100 nm from the surface. By thismeasure, the solubility velocity in hydrofluoric acid can be suppressedto a level approximately equal to that of an non-doped silicon oxidefilm, thus enabling the step between the elements to be flattened.

FIG. 110 shows an effect of improving the solubility velocity of BPSG inhydrofluoric acid (1:100 dilution with water). The etching rate of BPSG,which has been treated at 850° C. in an atmosphere of nitrogen, isapproximately at 45 nanometers/minute irrespective of the treating time.On the other hand, where BPSG is subjected to thermal treatment (i.e.nitriding treatment) in an atmosphere of ammonia for 10 minutes or more,its etching rate is reduced to approximately 5 nanometers/minute. Anetching rate, in the case where a non-doped oxide film (deposited by achemical vapor phase growth process) is nitrided is set out, with itsvalue being almost the same as that attained by thermal treatment in anatmosphere of nitrogen. As shown in the figure, the etching rate of anitrided film of BPSG can be reduced to half of a non-doped, depositedoxide film.

FIG. 111 shows an effect of a treating temperature in the case where itis subjected to thermal treatment in an atmosphere of ammonia for 20minutes. It has been found that the etching rate is almost the same asthat of a non-doped, deposited oxide film for a treatment at 750° C. andcan be reduced to a lower level for 800° C. or higher.

From these experiments, it will be seen that the etching rate of BPSG,which has been nitrided at a temperature of 750° C. or more, with 1:100dilution of hydrofluoric acid, can be suppressed to a level lower thanthat of a non-doped, deposited oxide film, i.e. to a level approximatelyof 5 nanometers/minute. This value is sufficient to keep a flat stepbetween elements.

The effects attained by typical ones among the features disclosedhereinafter will be described below in a brief summary.

(1) Since a shallow groove structure using a buried insulating film isused to effect isolation between memory cells and selective transistors,a lowering of the isolation withstand voltage in the fine region ispresented, and a variation in threshold value of the selectivetransistors can be reduced.

(2) Memory cells in a memory mat can be segmented by means of theselective transistors, thereby improving the disturb resistance of thememory cells.

(3) An information rewriting system where electric charges are injectedand released on the entire surfaces of the channels, so that a shallowjunction impurity semiconductor region structure is enabled. As aresult, a cell operation in a fine region becomes possible. In addition,the degradation of gate oxide films caused by rewriting can be reduced.

(4) The impurity semiconductor region of high withstand voltage MOStransistors is formed prior to the formation of an impuritysemiconductor region of memory cells having fine gate structures,thereby preventing unnecessary heat diffusion to the memory cells toensure the operation in the fine gate region.

(5) After formation of the first floating gate electrode, a buried layerconsisting of a silicon oxide film, which is formed by a CVD process, ina substrate region between the gate electrodes, is planarized, so thatfine processing without involving dimensional variations becomespossible in the processing of the second floating gate electrodes and inthe processing of word lines intersecting at right angles with thefloating gate electrodes.

(6) A flat element structure is realized by burying irregularitiesderived from the difference in height between elements, and an etchingresistance of the insulating film realizing the planarization can beimproved. As a result, all processing failures derived from thedifference in height between the elements can be fully suppressed.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic, diagram showing the entirety of an AND-type flashmemory representing Embodiment 1;

FIG. 2 is a schematic diagram showing an essential circuit of theAND-type flash memory of Embodiment 1;

FIG. 3 is a schematic diagram showing an example of a planar layout ofthe AND-type flash memory of Embodiment 1;

FIG. 4 is a sectional view taken along the line IV—IV of FIG. 3;

FIG. 5 is a sectional view taken along the line V—V of FIG. 3;

FIG. 6 is sectional view taken along the line VI—VI of FIG. 3;

FIGS. 7 to 19 are, respectively, sectional views showing, in sequence,an example of a method for fabricating the AND-type flash memory ofEmbodiment 1;

FIG. 20 is a schematic diagram showing an example of a planar layout ofan AND-type flash memory representing Embodiment 2;

FIG. 21 is a sectional view taken along the line XXI—XXI of FIG. 20;

FIG. 22 is a sectional view taken along the line XXII—XXII of FIG. 20;

FIG. 23 is a sectional view taken along the line XXIII—XXIII of FIG. 20;

FIGS. 24 to 35 are, respectively, sectional views showing, in sequence,an example of a method for fabricating the AND-type flash memory ofEmbodiment 2;

FIGS. 36 to 42 are, respectively, sectional views showing, in sequence,an example of a method for fabricating an AND-type flash memory ofEmbodiment 3;

FIGS. 43 to 49 are, respectively, sectional views showing, in sequence,an example of a method for fabricating the AND-type flash memory ofEmbodiment 4;

FIG. 50 is a diagram showing how a threshold value differs depending onthe injected amount of electrons;

FIG. 51 is a table showing control voltages applied to memory cells inread, write and erase operations of data conducted in Embodiment 5 alongwith schematic views of a memory cell;

FIG. 52 is a flow chart showing an example of a write sequence:

FIG. 53 is a plan view showing part of a structure of memory cells andselective transistors of an AND-type flash memory representingEmbodiment 5;

FIG. 54 is a sectional view showing an example of the AND-type flashmemory of Embodiment 5;

FIGS. 55 to 77 are, respectively, sectional or plan views showing, insequence, an example of a method for fabricating the AND flash memory ofEmbodiment 5;

FIG. 78 is a plan view showing a memory cell region of an example of anAND-type flash memory representing Embodiment 6;

FIG. 79 is a sectional view of an AND-type flash memory of Embodiment 7;

FIGS. 80 and 81 are, respectively, sectional views showing an enlarged Dportion in FIG. 79;

FIGS. 82 to 87 are, respectively, plan or sectional views showing, insequence, an example of a method for fabricating an AND-type flashmemory of Embodiment 6;

FIGS. 88 to 99 are, respectively, plan or sectional views showing, insequence, an example of a method for fabricating an AND-type flashmemory representing Embodiment 7;

FIGS. 100 to 104 are, respectively, sectional views showing an exampleof a semiconductor device representing Embodiment 8;

FIGS. 105 to 109 are, respectively, sectional views showing an exampleof a semiconductor device representing Embodiment 9;

FIG. 110 is a graph showing an effect of improving the dissolutionvelocity of BPSG in hydrofluoric acid (diluted with water at 1:100);

FIG. 111 is a graph showing an effect of a heat treating temperature incase where heat treatment is effected in an atmosphere of ammonia for 20minutes;

FIGS. 112 to 120 are, respectively, plan or sectional views showing aNOR flash memory representing Embodiment 10 or sectional or plan viewsshowing, in sequence, an example of its fabrication method; and

FIGS. 121 and 122 are, respectively, sectional views showing anothertype of NOR flash memory.

BEST MODE FOR CARRYING OUT THE INVENTION

The embodiments of the invention will be described in detail withreference to the drawings.

(Embodiment 1)

Embodiment 1 of the invention, is an AND-type flash memory, which is oneexample of a non-volatile semiconductor device.

FIG. 1 is a schematic block diagram showing the overall chipconfiguration of an AND-type flash memory representing Embodiment 1.FIG. 2 is a view showing an essential circuit of the AND flash memory ofEmbodiment 1.

The AND-type flash memory of this embodiment is provided with a memoryarray MEMARRAY, a latch circuit LATCH, and a column decoder XDEC. Thememory array MEMARRAY has 4 kbits, i.e. 512 bytes, of memory cellsconnected to at least one word line selected by means of address inputAx, with 16 thousand addresses (usually, the number of word lines) alongthe column direction. The latch circuit LATCH has a length correspondingto 4 kbits (512 bytes)

In the memory chip, control signals including chip selective signals,write operation control signals, erase operation control signals and thelike are inputted to a control circuit CNTRL (indicated as CNTRL as awhole), and addresses are inputted to column decoder XDEC and columndecoder YDEC, including a word line voltage control circuit and a sourceline voltage control circuit, via an input buffer (not shown). Thecolumn address Ay is internally generated by use of a counter circuit inthe control circuit CNTRL and may be passed to a column gate YDEC.

On the other hand, data is connected to a sense system includinginput-output circuit I/O and a data latch system. The sense systemSESEAMP receives signals from the control circuit CNTRL and serves totransfer data to memory cells via a column gate YGATE or to recognizememory cell data or transmit data through an internal bus BUS.

On the other hand, data is inputted to a sense circuit via theinput-output circuit I/O and a bus BUS. The sense circuit includes alatch circuit LATCH and a sense amplifier control circuit YD-CNTRL. Thesense circuit receives signals from the control circuit CNTRL, and isprovided with the functions of effecting data transfer to a memory cellvia a column gate and also of recognition of memory cell data andeffecting data transmission through the internal bus BUS.

Besides, the memory chip CHIP is further provided with a bit linevoltage control circuit DISCHARGE for controlling the voltage of bitlines in the memory array MEMARRAY and an internal voltage generatingcircuit CPC for transmitting a voltage to the respective voltage controlcircuits.

Next, the circuit arrangement of the AND-type flash memory of thisembodiment will be described with reference to FIG. 2. The memory arrayMEMARRAY has memory cells M11 to M22 and N11 to N22 arranged in the formof a matrix, and the gates (gate electrodes) of the respective memorycells are connected to word wires W11 to W12. The drains (drain regions)of the respective memory cells are connected to selective transistorsSD11 to SD22 for selecting the same via data lines D11 to D22. Thedrains of the selective transistors SD11 to SD22 are respectively,connected to global data lines GD1 to GD2. The sources (source regions)of the memory cells are likewise connected to a common source linethrough source lines S11 to S22 and selective transistors SS11 to SS22.The gates of the respective selective transistors SD11 to SD22 and SS11to SS22 are connected to gate wires SiD1 to SiD2 and SiS1 to SiS2. Theselective transistors constitute a block BL1 or BL2 wherein 64 or 128memory cells along the direction of a data line are collected in oneblock. In FIG. 2, the memory array MEMARRAY is constituted of twoblocks, but the invention should not be construed as being limitedthereto.

The column decoder XDEC includes a word line voltage control circuitsXDEC1 and XDEC2 for applying a high voltage to the word wires W11 to W22and selective transistor control circuits SGDEC1 and SGDEC2, and mayinclude a source voltage control circuit SDEC to which the common sourceline is connected and which is illustrated in another region in thefigure. A high potential voltage Vpp (Vww, Vwd, etc.), a low potentialvoltage Vcc (Vrw, Vec, etc.) and a negative potential voltage Vnn (−Vew,etc.), which are generated in the internal voltage generating circuitCPC, are supplied to the column decoder, and a word line select signalis applied to the decoder by means of a column address Ax. Moreparticularly, the internal voltage generating circuit CPC acts togenerate voltages (Vww and others) used for reading, writing and erasingoperations described hereinafter by use of a power supply voltage Vcc(e.g. 3.3 V) and a reference voltage (ground at 0 volt) supplied fromoutside of the chip.

As for the direction of the bit line, charge-withdrawing MOS transistorsQD1, QD2 having the function of withdrawing electrons of the bit lines(global data lines GD1, GD2) prior to the a operation are provided foreach of the data lines D11 to D22. These are also provided with thefunction of supplying, to the bit lines, a voltage from the voltagegenerating circuit in the non-select bit lines at the time of a writeoperation. On the other hand, the bit lines (global data lines GD1, GD2)are connected to the latch circuit LATCH via the column gate controlcircuit YD-CNTRL.

The states of the various elements for read, write and erase operationsof the memory mat in FIG. 2 are shown in Table 1. Table 1 represents thecase where the memory cell M11 is selected.

Read Write Erase W11 Vread Vww −Vew W12 0 0 0 W21 0 0 0 W22 0 0 0 GD1 10 0 GD2 1 Vwd 0 D11 1 0 0 D12 1 Vwd 0 D21 Open Open Open D22 Open OpenOpen S11 0 0 0 S12 0 Open 0 S21 Open Open Open S22 Open Open Open SiD1On On On SiD2 Off Off Off SiS1 On Off On SiS2 Off Off Off

For the write operation in the memory cell M11 in FIG. 2. a voltage ofVww (e.g., 17V) is applied to the word line W11, and a voltage, forexample, of 10 V is applied to the gate SiD1 of the selective transistorat the drain side to turn the selective transistors SD11, SD12 on. Avoltage of 0 V is applied to the selected local bit line (data line D11)via the selective transistor SD11. On the other hand, a voltage of 0 Vis applied to the non-selected word line W12, and a voltage of Vwd (e.g.6 V) is applied to the non-selected local bit line (data line D12) fromthe bit line (global data line GD2) via the selective transistor SD12.The gate SiS1 of the selective transistor at the source side is suppliedwith a voltage of 0 V, thereby turning the selective transistors SS11,SS12 to an off state. In this way, electrons can be injected into afloating gate by a tunnel current through the entire surface of thechannel region of the memory cell M11. On the other hand, no injectionof electrons takes place in the non-selected memory cells M12 and M21,M22 because any high electric field is applied between the floating gateand the substrate.

In a write operation, an inversion layer is formed on the entire surfaceof the channel region and voltages at the source and drain terminals areset at the same level, thus not influencing the breakdown voltagebetween the source and drain terminals.

In an erase operation, a voltage of −Vew (e.g. −17 V0 is applied to theselected word line W11 and 3.3 V is applied to the gates SiS1 and SiD1of the selective transistor, so that all the selective transistorsconnected thereto are turned on. A voltage of 0 V is supplied to thelocal bit and the local source line via the selective transistors. Avoltage of 0 V is applied to the non-selected word line W12 In thismanner, electrons of all memory cells connected to the selected wordline W11 are released. The voltage values indicated above are absolutevalues relative to a well potential.

In the writing and erasing operations, when all of the selectivetransistors SD21, SD22 and SS21, SS22 in the non-selected block areturned off, the disturb phenomenon ascribed to the bit lines can beprevented.

Next, an arrangement of the AND-type flash memory of this embodimentwill be described. FIG. 3 is a schematic view showing an example of aplanar layout of the AND-type flash memory of Embodiment 1.

The AND-type flash memory has memory cells M (M11 to M22, N11 to N22)arranged in rows and columns to form memory cell blocks BL (BL1, BL2).

In the row direction (word line direction) of the respective memorycells, word lines 301(8), which function as control gate electrodes ofthe memory cells M (word lines W11 to W12), extend. At opposite ends ofthe respective memory cells H along the column direction (bit linedirection), selective transistors SD (SD11, SD12) and selectivetransistors SS (SS11, SS12) are arranged. The selective transistors SDand the selective transistors SS are arranged such that individualtransistors are isolated with an isolation region 302(19). The memorycells M are each constituted of a MISFET (metal-insulator-semiconductorfield effect transistor).

The source and drain regions of the memory cells M are, respectively,constituted commonly of source regions 303(11) which function as sourcelines S11, S12 and are provided in the form of an n-type semiconductorregion, and drain regions 304(10), which function as data lines D11, D21and are provided in the form of an n-type semiconductor region. Memorycells M adjoining in the column direction are isolated by isolationregions 305 (5).

Although not shown in FIG. 3, global data lines GD (GD1, GD2) made of ametal wire are electrically connected to n-type semiconductor regions306, which serve as drain regions of the selective transistors SD, viacontact holes 306, and n-type semiconductor regions 308(21), which serveas source regions of the selective transistors SD, are electricallyconnected to the drain regions 304(10). On the other hand, a metal wireconstituting the common source line is so arranged as to intersect withthe global data lines GD, although not shown, and this metal wire iselectrically connected to n-type semiconductor regions 310 serving assource regions of the selective transistors SS via contact holes 309.n-Type semiconductor regions 311 serving as drain regions of theselective transistors 303 are electrically connected to the sourceregions 303(11) within the memory cell block. The gate electrodes 312,313 of the selective transistors SD, SS are constituted of a wiringmaterial for the word lines 301(8) above the floating gates.

The transistor region of the memory cell M is a region shown as afloating gate electrode 314 (3, 7). The floating gate electrode 314 (3,7) is formed below the word line 301(8) and has a double-layeredstructure consisting of a first floating gate electrode 314 a(3) and asecond floating gate electrode 314 b(7). The first floating gateelectrode 314 a(3) is formed on the main surface of the semiconductorsubstrate 1 through a tunnel oxide film 2 and is also formed on achannel region between the source region 303(11) and the drain region304(10). The second floating gate electrode 314 b(7) is placed on thefirst floating gate electrode 314 a(3) to determine the capacitancevalues of the word line 301(8) and the floating gate electrode 314 (3,7). A control gate electrode 8 is formed on the second floating gateelectrode 314 b through an interlayer insulating film 15, and thecontrol gate electrode is formed integrally with the word line 301(8).More particularly, the channel region is arranged between the sourceregion 303(11) and the drain region 304(10) in the row direction.

Buffering gates 315 are, respectively, formed between the memory cells Mand the selective transistors SD, SS for separating the transistors.

Next, the sectional structure of the AND-type flash memory of thisembodiment will be described. FIG. 4 is a sectional view taken along theline VI—VI of FIG. 3, and FIG. 5 is a sectional view taken along theline V—V of FIG. 3. FIG. 6 is a sectional view taken along the lineVI—VI of FIG. 3.

Individual memory cells have such a structure that they are isolatedfrom one another by shallow groove isolation (SGI: Sharrow GrooveIsolation) and a p-channel stopper region 16, and the deposited oxidefilm 5 is formed at the groove portion of the silicon substrate. Thep-type silicon substrate 1 is covered on the surface thereof with atunnel oxide film 2 which is a gate insulating film having a thicknessof about 9.5 nm, and a first floating gate electrode 3 (314 a) formed ofa polysilicon layer is formed on the tunnel oxide film 2. The firstfloating gate electrode 3 is covered at side surfaces thereof with aninsulating film 4 serving as a side wall spacer, on which the secondfloating gate electrode 7 (314 b) made of polysilicon is formed. Thesecond floating gate electrode 7 and the first floating gate electrode 3are electrically connected to each other. An interlayer insulating film15 is formed on the second floating gate electrode 7 and an isolationregion 5. Moreover, a control gate electrode 8 (301), which is made of asilicide layer, such as of polysilicon or tungsten, and an insulatingfilm 7 are formed on the interlayer insulating film 15. Although notshown in FIG. 5, an insulating film 128 is formed on the control gateelectrode 8, on which a metal wire serving as a word line. (global dataline GD) is formed so as to intersect with the control gate electrode 8.A source region 11 (303) and a drain region 10 (304) of the memory cellare formed within the silicon substrate beneath the first floating gateelectrode 3. The semiconductor regions (source region 11, and drainregion 10) of the memory cell are electrically connected tosemiconductor regions 308 (21) 311 of the selective transistors (SD, SS)(FIG. 5). As will be described hereinafter, the source region 11 (303)and the drain region 10 (304) are symmetrical in structure and areconstituted as having a shallow junction.

MISFET's other than the memory cell M and the selective transistors SD,SS constitute a peripheral circuit, which is formed in a peripheralcircuit-forming region (peripheral circuit portion). A MISFET, to whicha high potential voltage Vp is applied, is formed as a high withstandvoltage MISFET. Circuits including the high withstand voltage MISFETinclude, for example, the internal voltage generating circuit. CPC, thecolumn decoder XDEC, and the like.

The gate electrodes (312, 313) of the selective transistor are made ofthe same material as that used for the cont gate electrode 8 of thememory cell. An element isolation 19 is formed in an isolation step ofthe peripheral circuit portion described hereinafter (FIG. 4).

A gate oxide film 9 of the selective transistor is formed to have athickness larger than the gate insulating film 2 and has a thickness,for example, of approximately 25 nm.

In the section parallel to the data lines (FIG. 6), word lines (301, 8)are formed at equal intervals of a minimum processing size, with abuilt-up structure of the first and second floating gate electrodes 3,7, the interlayer insulating film 15 and the control gate electrode 8serving as a word line. The word lines are isolated from one another bymeans of p-type semiconductor regions 23 introduced through ioninjection. A buffer gate (residual gate) 315 is formed between theselective transistor and the word line. The floating gate electrode 7 ofthe residual gate 315 and the control gate electrode 8 are internallyconnected, thus ensuring electric conduction.

Next, a method for fabricating the AND-type flash memory will bedescribed with reference to FIGS. 7 to 19. FIGS. 7 to 19 are,respectively, sectional views showing, in sequence, an example of amethod of fabricating the AND flash memory of Embodiment 1. It will benoted that, in FIGS. 7 to 19, the left-side region indicates aperipheral circuit-forming region (peripheral circuit portion) in whicha transistor of a peripheral circuit is formed and the right-side regionindicates a memory-forming region (memory cell portion) wherein memorycells are formed.

Initially, a silicon oxide film 103 and a silicon nitride film 104 areattached (deposited) on a p-type semiconductor substrate 1, after whicha photoresist is patterned so as to form an element isolation region ofa peripheral circuit portion, followed by dry etching of the siliconnitride film 104 through the photoresist as a mask. Thereafter, thesilicon oxide film 103 is removed, followed by further etching of thesemiconductor substrate through the mask of the silicon nitride film 104by dry etching so that about 0.35 μm thick grooves are formed in thesemiconductor substrate 1. Next, the semiconductor substrate 1 isoxidized to form an approximately 30 nm thick silicon oxide film 101inside the grooves formed by the etching. Subsequently, an insulatingfilm (silicon oxide film) 102 is attached (deposited) to a thickness ofapproximately 0.5 μm according to the CVD method. The insulating film102 is polished by the CMP (chemical mechanical polishing) method andplanarized to the surface of the silicon nitride film 104. (FIG. 7)

Next, the silicon nitride film 104 is removed by wet etching, such aswith hot phosphoric acid or the like, thereby forming an elementisolation region 302 (19) made of the insulating film 102. In thisstage, isolation regions of selective transistors within a memory matare simultaneously formed. Then, boron (B) is ion-injected into thesemiconductor substrate 1 several times by divided steps. In therespective injection steps, the energy and dosage are controlled. Inthis way, there are formed a p-type well region 105, a channel stopperregion 107 and a channel region 108. Next, the semiconductor substrate 1is thermally oxidized on the surface thereof to form a 9.5 nm thicksilicon oxide film 110 (FIG. 8). The silicon oxide film 110 serves as atunnel oxide film 2.

Subsequently, a first polysilicon film (conductive film) 111, aninsulating film (silicon oxide film) 112 and a silicon nitride (SiN)film 113 used as an insulating film are successively attached(deposited), for example, by the CVD method, thereby forming a built-upfilm 114 The first polysilicon film 111 may be either a phosphorus-dopedpolysilicon film wherein impurity phosphorus is doped at about 1×10²⁰atoms/cm², or a non-doped polysilicon film. Thereafter, the polysiliconfilm 111, insulating film 112 and silicon nitride film 113 are,respectively, processed by dry etching using a photoetching process sothat the polysilicon film 111 provides the first floating gateelectrodes (3, 314 a) in the memory cell portion and the surface of thesemiconductor substrate 1 is protected in the peripheral circuitportion. By dry etching, the built-up film 114 in the memory cellportion is patterned in a line pattern extending in the column direction(i.e. a striped column pattern (column lines)). Thus, in the peripheralcircuit portion and also in the region where selective transistors areformed, although not shown, the polysilicon film 111, insulating film112 and silicon nitride film 113 are left so as to protect the surfaceof the semiconductor substrate 1. This permits grooves to be formedbetween the column patterns in the row direction.

Next, the photoresist is patterned so that a region, in which memorycells are to be formed, is exposed, and arsenic (As) ions are ionimplanted into the substrate, for example, under conditions of a dosageof 5×10¹⁵ atoms/cm² and an acceleration voltage of 50 KeV to formsemiconductor regions (diffusion layers) 10, 11, 115, 303, 304 servingas source/drain regions. In this ion implantation, the built-up film 114of the column pattern functions as a mask in addition to thephotoresist. This allows the n-type semiconductor region 115 to beself-alignedly formed relative to the column pattern, so that thesemiconductor regions 115 can be formed with high precision relative tothe fine column pattern. More particularly, the source regions 11, 115and 303 and the drain regions 10, 115 and 304 are formed at the sametime or by the same ion implantation step, and are thus constituted witha symmetric structure. In other words, the source regions 11, 115 and303 and the drain regions 10, 115 and 304 are so arranged as to have thesame impurity profile.

Since the silicon nitride film 113 is formed on the upper layer of thebuilt-up film 114 serving as a mask, the implanted impurity is stoppedat the silicon nitride film, not influencing the characteristicproperties of the polysilicon film 111 and the lower semiconductorsubstrate 1. As will be described hereinafter, the semiconductor regions115, respectively, result in the source regions 303 (11) and the drainregions 304(10) functioning as source lines or data lines.

Next, a 200 nm thick silicon oxide film, which is an insulating film, isdeposited according to the CVD method, and the silicon oxide film issubjected to anisotropic etching to form side wall spacers 116 at sidesurfaces of the built-up film 114 (FIG. 9)

Thereafter, the built-up film 114 of the memory cell portion and thesemiconductor substrate 2 in regions where no side wall spacer is formedare removed by anisotropic dry etching to form about 0.35 μm deepgrooves 117 (FIG. 10). For the dry etching, the built-up film 114 andthe side wall spacers 116 function as an etching mask in addition to thephotoresist covering the peripheral circuit portion and the selectivetransistor portion, and thus, the grooves 117 can be self-alignedlyprocessed relative to the built-up films 114 and the side wall spacers116. Hence, the grooves 117 can be stably processed even in a finecolumn pattern thereby forming an element isolation region. This iseffective in realizing a high degree of integration of the AND-typeflash memory. It will be noted that at this stage, an impurity is ionimplanted into the bottom of each groove 117 to form a channel stopperregion 16.

The groove 117 is oxidized at the inside thereof to form anapproximately 40 nm thick silicon oxide film 118, followed by attaching(depositing) an about 400 nm thick silicon oxide film (silicon oxidefilm) 119 by the CVD method (FIG. 11).

Subsequently, the insulating film 119 is polished according to the CMPtechnique for planarization to the silicon nitride film 113 which is theupper portion of the built-up film 114 (FIG. 12). In this way, theinsulating film 119 is buried between the sidewall spacers 116, and itssurface position becomes substantially equal to the level between thecolumn patterns and also to the level of the memory cell portion and theelement isolation region. In this manner, there can be formed a shallowgroove isolation region made of the deposited oxide film 5. It should benoted that in the planarization by the CMP technique, the siliconnitride film 113 functions as a stopper for the CMP, thereby increasingthe process margin of the planarization. Since the peripheral circuitportion and the like are covered with the built-up film 114, the surfaceof the semiconductor substrate 1 at the covered portion is not damagedor contaminated when undergoing the CMP step, and the formation of arecessed portion with a wide area can be prevented, thereby preventingdishing which impedes the planarization. Moreover, since the insulatingfilm 119, which is buried only in the groove 117 which is formed in thememory cell portion, has uniform width and length, and is formed byrepetitions of a regular pattern, the process margin can be increased atthe time of polishing by the CMP method. It will be noted that theplanarization also may be effected by the combination of the CMP methodand the etching method.

After removal of the silicon nitride film 113 with hot phosphoric acid,the silicon oxide film 112 is removed by dry etching (FIG. 13).

Next, a second polysilicon film 120 is attached (deposited) by the CVDmethod or the like, followed by processing (patterning) by a hot etchingstep to provide the second floating gate electrode 7. At that time, theperipheral circuit portion is protected. Thereafter, an interlayerinsulating film 121 is formed (FIG. 14). The second polysilicon film 120is doped, for example, with phosphorus (P) as an impurity.

The interlayer insulating film 121, second polysilicon film 120 andpolysilicon film 111 at the peripheral circuit portion and the selectivetransistor portion are removed by a photoetching step (FIG. 15).

The surface position of the insulating film 119 is so arranged as to behigher than the surface position of the first polysilicon film 111 whichresults in the first floating gate electrode 3. In this way, the secondpolysilicon film 120, which results in the second floating gateelectrode 7, is formed as extending over the insulating film 119. As aresult, the capacitance between the second floating gate electrode 7 andthe source/drain region (semiconductor region 115) can be reducedthereby improving the characteristics of the memory cell M. Moreparticularly, the surface position of the insulating film 119 beneaththe second polysilicon film, which results in the second floating gateelectrode 7, is so arranged as to be higher than the surface position ofthe first polysilicon film 111 which results in the first floating gateelectrode 3. Moreover, the surface position of the insulating film 119is so arranged as to be uniform in between the first polysilicon films111. The surface position of the insulating film 119 is arranged so asto be higher than the surface position of the insulating film 102.

Then, the channel regions of the peripheral circuit portion and theselective transistor portion are formed on the main surface of thesemiconductor substrate 1 by ion implantation, after which the siliconoxide film 110 is removed to expose the main surface of thesemiconductor substrate 1, followed by oxidation of the exposed surfaceof the semiconductor substrate 1 thereby forming an approximately 25 nmthick silicon oxide film 109 which is thicker than the gate insulatingfilm 2. Subsequently, a third polysilicon film 122 and a WSi₂ (tungstensilicide) film 123 and a silicon oxide film 124 (17), which is aninsulating film and is formed by the CVD method, are successively formed(FIG. 16). The third polysilicon film 122 and the WSi₂ film 123 resultin a control gate electrode 301 (8).

Next, the silicon oxide film 124 (17) is processed by a photoetchingprocess so as to make a pattern of gate electrodes of the transistors ofthe peripheral circuit portion, gate electrodes of the selectivetransistors, and control gate electrodes of the memory cells.Thereafter, the WSi₂ film 123 and the third polysilicon film 122 areprocessed through a mask of the silicon oxide film 124 (17). Thus,patterning is effected in a direction vertical to the extendingdirection of the column pattern, thereby forming control gate electrodes301(8) and word wires extending in the column direction. After aphotoresist is patterned so as to open the memory cell portion, theinterlayer insulating film 121 and the second and first polysiliconfilms 121, 111 are successively processed. The thus patterned WSi₂ film123 and third polysilicon film 122 function as a gate electrode of theMOS transistor of the peripheral circuit. Moreover, the patternedinterlayer insulating film 121, and the second and first polysiliconfilms 120, 111, respectively, become the interlayer insulating film 15,the second floating gate electrode 7 and the first floating gateelectrode of the memory cell M.

Next, the photoresist is so patterned as to open the MOS transistor ofthe peripheral circuit portion, and, for example, phosphorus (P) ionsare implanted into the substrate under conditions of a dosage of 2×10¹³atoms/cm² and an acceleration voltage of 100 keV, followed by thermaldiffusion at 850° C. to form an N-type low concentration semiconductorregion 125 of the high withstand voltage MOS transistor of theperipheral circuit portion. Likewise, although not shown in the figures,the photoresist is patterned to form N-type low concentrationsemiconductor regions of the MOS transistor of the peripheral circuitportion and the selective transistor (FIG. 17).

Thereafter, an approximately 200 nm thick silicon oxide film serving asan insulating film is formed, for example, by the CVD method andsubjected to anisotropic etching to form side wall spacers 126 on theside surfaces of the gate electrode of the MOS transistor of theperipheral circuit by anisotropic etching. The photoresist is sopatterned as to open the peripheral circuit portion and the selectivetransistor portion, and arsenic (As) ions are, for example, implantedinto the substrate under conditions of a dosage of 5×10¹⁵ atoms/cm² andan acceleration voltage of 50 keV to form an, N-type high concentrationsemiconductor region 127 (FIG. 18),

Next, a silicon oxide film and an interlayer insulating film 128 made ofphosphate glass are formed according to the CVD method, and a plugelectrode 129 is formed in a contact hole to form metal wires 130. Inthis way, the MOS transistor of the peripheral circuit portion and theMOS transistor constituting the memory cell of a fine gate are formed onthe same substrate.

As described hereinabove, in the AND-type flash memory and fabricationmethod of this embodiment, a shallow groove isolation is applied to thememory cell and the selective transistor. When the rewriting systemusing an entire surface channel is adopted, the semiconductor regions10, 11, 115, 303 and 304 of the memory cell can be formed in a shallowjunction and can have a symmetric structure, enabling one to make a finememory cell. When adopting the rewriting system using the entire surfacechannel, the degradation of a silicon oxide ascribed to the rewritestress can be reduced. Moreover, the memory blocks are divided by meansof the selective transistors, so that disturbance in a non-selectedblock at the time of rewriting can be reduced.

(Embodiment 2)

In Embodiment 1, the gate electrode of the selective transistors is madeof the same material as the control gate electrode. In this Embodiment2, an example where the gate electrodes of the selective transistors areconstituted of a material for the floating gate electrode and thecontrol gate electrode is provided. Moreover, an example where theformation of the isolation region of the selective transistors can beformed simultaneously with the formation of the isolation region of thememory cell portion will be considered.

The layout and the circuit arrangement in the entirety of the chip ofthe AND-type flash memory of this embodiment are similar to those ofEmbodiment 1 and their illustration is omitted.

FIG. 20 is a diagram showing an example of a planar layout of anAND-type flash memory representing Embodiment 2. FIG. 21 is a sectionalview taken along the line XXI—XXI of FIG. 20, FIG. 22 is a sectionalview taken along the line XXII—XXII of FIG. 20, and FIG. 23 is asectional view taken along the line XXIII—XXIII of FIG. 20.

As shown in FIG. 20, the buffer gate 315 is not formed in the AND-typeflash memory of the present embodiment. As will be described later, thisis made possible based on the fact that the gate electrodes of theselective transistors are constituted of a material for the floatinggate electrode and the control gate electrode.

As shown in FIG. 21, the gate electrodes of the selective transistorsSD, SS are made of a material for the first and second floating gateelectrodes 3, 7 and the control gate electrode 8. The element isolation5 has the same structure as the memory portion. As shown in FIG. 23, ina section parallel to the data line, the word lines are formed at equalintervals by a minimum processing size, and the first and secondfloating gate electrodes 3, 7, the interlayer insulating film 15 and thecontrol gate electrode 8, which results in a word line, are arranged toprovide a built-up structure. The word lines are isolated with a P-typesemiconductor region 23 introduced by ion implantation. The interlayerinsulating film 15 inside the selective transistor is partially removedso that the floating gate electrode 7 and the control gate electrode arerendered electrically conductive. The gate oxide film 9 of the selectivetransistor has a thickness of approximately 25 nm.

The section shown in FIG. 22 is similar to that of Embodiment 1 with itsillustration being omitted.

Next, the method of fabricating the AND-type flash memory of thisembodiment will be described with reference to FIGS. 24 to 35. FIGS. 24to 35 are, respectively, sectional views showing, in sequence, themethod of fabricating the AND-type flash memory of Embodiment 2. It willbe noted that in FIGS. 24 to 35, the left-side region indicates aperipheral circuit portion and the right-side region indicates a memorycell portion, like Embodiment 1.

In the fabrication method of this embodiment, the step prior to theformation of the silicon oxide film 11 shown in FIG. 8 in Embodiment 1is similar to that of Embodiment 1 and its illustration is omitted. Itshould be noted here that an element isolation region formed prior tothis step is formed only at the peripheral circuit portion and is notformed in a region where selective transistors are formed.

Next, the semiconductor substrate 1 is oxidized on the surface thereofto form an about 20 nm thick thermally oxidized film 109. The thermallyoxidized film 109 at the memory cell portion is removed by aphotoetching technique, and the resultant exposed substrate surface isoxidized to form a 9.5 nm thick silicon oxide film 110. At this time,the thermally oxidized film 109 of the peripheral MOS transistors andthe selective transistors inside the memory mat, not shown in thefigure, has a thickness of 25 nm. The silicon oxide film 110 becomes atunnel oxide film 2, and the thermally oxidized film results in a gateinsulating film of the transistor of the peripheral circuit and theselective transistor.

Next, a first polysilicon film 111, a silicon oxide film 112 formed bythe CVD method and a silicon nitride film 113 are successively attached(deposited) to provide a built-up film 114. Thereafter, the built-upfilm 114 is subjected to dry etching by a photoetching process so thatthe polysilicon film 111 results in a first gate electrode in the memorycell and also in a gate electrode of the MOS transistor in theperipheral circuit portion.

Then, a photoresist is patterned so that the MOS transistor of theperipheral circuit portion is opened, followed by ion implantation, forexample, of phosphorus (P) ions under conditions of a dosage of 2×10¹³atoms/cm² and an acceleration voltage of 100 keV and thermal diffusionat 900° C. to form an N-type low concentration semiconductor region 125of the high withstand voltage MOS transistor of the peripheral circuitportion. Although not shown in the figures, the photoresist is sopatterned as to form an N-type low concentration semiconductor region ofthe selective transistor. Thereafter, the photoresist is patterned so asto open the memory cell portion, followed by ion implantation, forexample, of arsenic (As) ions into the substrate under conditions of adosage of 5×10¹⁵ atoms/cm² and an acceleration voltage of 50 keV to forma semiconductor region 115 of the memory cell (FIG. 25).

Subsequently, a silicon oxide film which is a 200 nm thick insulatingfilm is formed by the CVD method, and is subjected to anisotropicetching to form side wall spacers 116 on the side surfaces of thepatterned built-up film 114. Next, the photoresist is so patterned as toopen the peripheral circuit portion, followed by ion implantation, forexample, of arsenic (As) ions into the substrate under conditions of adosage of 10¹⁵ atoms/cm² and an acceleration voltage of 500 keV to formN-type high concentration semiconductor regions 127 of the peripheralcircuit and the selective MOS transistor portion (FIG. 26).

Next, the substrate regions between the gate electrodes of the memorycell portion and the selective transistor portion are scraped off byanisotropic dry etching to form about 0.35 μm deep grooves 117self-alignedly relative to the side wall spacers 116 (FIG. 27). Thegrooves 117 are oxidized on the surfaces thereof to form anapproximately 4 nm thick silicon oxide film 118, followed by forming(depositing) a silicon oxide film 119, which is a 400 nm thickinsulating film, by the CVD method (FIG. 28). The formation of thegrooves 117 and the formation of the silicon oxide film 118 and thesilicon oxide film 119 are similar to the case of Embodiment 1 exceptthat the grooves 117 are formed at the selective transistor portion.

Next, like Embodiment 1, the silicon oxide film 119 is scraped off bythe CMP technique for planarization to the silicon nitride film 113above the gate electrode 111 to bury the silicon oxide film 119 betweenthe side wall spacers 116 (FIG. 29). After removal of the siliconnitride film 113 with hot phosphoric acid, a photoresist is so patternedas to open the memory cell portion by a photoetching process, followedby removal of the silicon oxide film 112 by dry etching (FIG. 30). Inthis manner, the silicon oxide film 112 of the memory cell portion alonehas been removed, so that the silicon oxide film 112 at the peripheralcircuit portion can be left. Eventually, as will be describedhereinafter, when a second polysilicon film 120 is etched, thepolysilicon film 111 of the peripheral circuit portion can be protected.

Next, the second polysilicon film 120 is attached (deposited) and soprocessed as to provide a second floating gate electrode 7 by aphotoetching step (FIG. 31). At that time, the peripheral circuitportion is covered. Thereafter, after formation of an interlayerinsulating film 121, part of the interlayer insulating film 121 of theselective transistor is removed by a photoetching step, although notshown in the figure (FIG. 32). By the partial removal of the interlayerinsulating film 121 of the selective transistor, the control gateelectrode 8 and the second floating electrode 7 can be electricallyconnected, as will be described hereinafter.

A third polysilicon film 122 and a WSi₂ film, and a silicon oxide film124 formed by the CVD method are successively formed (FIG. 33).

Thereafter, the silicon oxide film 124, which is an insulating film, isprocessed by a photoetching process to provide a control gate electrodeof the memory cell, followed by successively processing, through a maskof the patterned silicon oxide film 124, the WSi₂ film 123, thirdpolysilicon 122, interlayer insulating film 121, and the second andfirst polysilicon films 120, 111 (FIG. 34). At this time, since theperipheral circuit portion has the silicon oxide film 112 formed by theCVD method, the gate electrode 111 is not etched.

As shown in FIG. 23, a photoresist is patterned, after which phosphorus(P) ions are, for example, implanted into the substrate under conditionsof a dosage of 2×10¹³ atoms/cm² and an acceleration voltage of 50 keV toform an N-type low concentration semiconductor region 21 of theselective transistor. Further, boron (B) ions are, for example,implanted into the substrate under conditions of a dosage of 1×10¹³atoms/cm² to form a P-type low concentration semiconductor region in asubstrate region between the word lines to form an element isolation inthe column direction (in the direction of the bit line). Subsequently, asilicon oxide film is formed by the CVD method and sidewall spacers 20are formed on the side surfaces of the gate electrode by anisotropic dryetching. The photoresist is patterned, followed by ion implantation, forexample of arsenic (As) ions into the substrate under conditions of adosage of 1×10¹⁵ atoms/cm² and an acceleration voltage of 50 keV to forman N-type high concentration semiconductor region 22 of the selectivetransistor.

As shown in FIG. 35, an MOS transistor of the peripheral circuit portionand a fine gate MOS transistor are formed on the same substrate via thesteps of formation of a silicon oxide film and an interlayer insulatingfilm 128 made of phosphate glass by the CVD method, a plug electrode 129within a contact hole, and metal wires 130.

In the above polysilicon gate processing, the channel width is definedby the processing of the lower polysilicon 3, and the channel length ofthe transistor is defined by the processing of the upper insulating film17 and the transistor in the peripheral circuit portion is formed of thepolysilicon film alone. As will become apparent from Embodiment 3, asecond polysilicon film, a third polysilicon film and a WSi₂ film may beadded as electrode wires.

As described above, this embodiment has not only the effects ofEmbodiment 1, but also has the effects of preventing unnecessaryelongation of the impurity semiconductor region relative to the memorycell having a fine gate and thus stabilizing the operations in the finegate region since the impurity semiconductor region of the memory isformed after the formation of the impurity semiconductor region of thehigh withstand voltage MOS transistor. In addition, the selectivetransistor is made of a material for the floating gate electrode andcontrol gate electrode of the memory, so that the region for separateformation of the gates illustrated in the first example becomesunnecessary, thereby reducing the area.

(Embodiment 3)

A third embodiment of the invention is illustrated with reference toFIGS. 36 to 42. FIGS. 36 to 42 are, respectively, sectional viewsshowing, in sequence, an example of a method of fabricating an AND-typeflash memory of Embodiment 3. It will be noted that in FIGS. 36 to 42,the left side region indicates a peripheral circuit portion and theright side region indicates a memory portion, like Embodiment 1.

In Embodiment 2, the gate electrode of the MOS transistor in theperipheral circuit portion is formed of the polysilicon film alone. Aswill become apparent from Embodiment 3, a second polysilicon film, athird polysilicon film and a WSi₂ film may be added as electrode wires.

As shown in FIG. 36, after the formation of an element isolation region102, a well 105 and a gate oxide film 2 on the semiconductor substrate 1as in Embodiment 2, a non-doped polysilicon film 111 and a siliconnitride film 113 are attached (deposited). Next, the polysilicon film111 and the upper silicon nitride film 113 are so processed by aphotoetching process as to provide a first gate electrode 3 in thememory cell portion and a gate electrode of the MOS transistor in theperipheral circuit portion. Like Embodiment 2, low concentrationsemiconductor regions 125 of the peripheral circuit, and semiconductorregions 125 of the peripheral circuit, and semiconductor regions 115 andside wall spacers 116 of the memory cell portion are, respectively,formed. Moreover, like Embodiment 2, high concentration semiconductorregions 127 of the peripheral portion are formed.

As shown in FIG. 37, the substrate is etched self-alignedly to thesidewall spacers 116 to form grooves 117 only in the memory cellportion, like Embodiment 2. Thereafter, a silicon oxide film 118 isformed and a silicon oxide film 119, which is a 400 nm thick insulatingfilm formed by the CVD method, is attached (deposited) after which thesilicon oxide film 119 is scraped off by the CMP technique forplanarization to an extent of the silicon nitride film 113 on the gateelectrode 111, thereby burying the silicon oxide film 119 in between theside wall spacers 116.

Next, the silicon nitride film 113 is removed by means of hot phosphoricacid, after which, as shown in FIG. 38, a second polysilicon film 120 isattached. (deposited) and processed to provide a second floating gateelectrode 7 by a photoetching step. At this time, the peripheral circuitportion is covered. Thereafter, an interlayer insulating film 121 isattached (deposited), followed by forming a partial opening at theinterlayer insulating film 121 on the gate electrodes of the transistorsof the peripheral circuit portion and the selective transistor portion(FIG. 39). The opening may be formed, for example, by a photoetchingtechnique. Moreover, a third polysilicon film 122 and a WSi₂ film 123,and a silicon oxide film 124 formed by the CVD method are successivelyformed (FIG. 40).

Then, the silicon oxide film 124 is so processed by a photoetchingprocess to provide a control gate electrode of the memory and gateelectrodes in the selective transistor portion and the peripheralcircuit portion. In this processing, the gate electrodes 111 of theperipheral circuit are covered during the processing as shown in FIG.41. Using a mask of the patterned silicon oxide film 124, WSi₂ film 123,third polysilicon 122, interlayer insulating film 121, and second andfirst polysilicon films 120, 111 are successively processed.

In subsequent steps, as shown in FIG. 42, impurity semiconductor regionsof the selective transistor are formed, after which there are formed theMOS transistor of the peripheral circuit portion and the fine gate MOStransistor on the same substrate through the steps of formation of thesilicon oxide film by the CVD method and the interlayer insulating film128 made of phosphate glass, the plug electrode 129 in the contact hole,and the metal wires 130 as in Embodiment 2.

As described hereinabove, in this embodiment, the second and thirdpolysilicon films and the WSi₂ film, which are electrically connected toone another, are arranged as a wiring material on the gate electrode ofthe MOS transistor of the peripheral circuit portion, thus realizing alow resistance gate wire.

(Embodiment 4)

A fourth embodiment of the invention will be described with reference toFIGS. 43 to 49. FIGS. 43 to 49 are, respectively, sectional viewsshowing, in sequence, an example of a method of fabricating an AND flashmemory of Embodiment 4. It will be noted that in FIGS. 43 to 49, theleft side region indicates a peripheral circuit portion, and the rightside region indicates a memory cell portion, like Embodiment 1.

In Embodiments 2 and 3, the gate electrodes of the memory cells and theselective transistors inside the memory mat have such a structure as tobe offset relative to shallow element isolation, and the gate electrodesof the peripheral circuit have the structure in contact with theisolation region. In this embodiment 4, there is used a structurewherein the gate electrode of the peripheral circuit is offset relativeto the isolation region.

As shown in FIG. 43, a P-type semiconductor substrate is oxidized toform a 20 nm thick silicon oxide film 109, after which the silicon oxideis removed only from the memory cell portion by a photoetchingtechnique. Next, a 9.5 nm thick silicon oxide film 110 is formed byoxidation. In the peripheral circuit portion, the oxide film thicknessis at 25 nm. A first polysilicon film 150 and a silicon nitride film 151are successively attached (deposited) on the silicon oxide film surface,followed by patterning to provide a first floating gate electrode in thememory cell portion and to remove the electrode materials in anisolation region in the peripheral circuit portion. Then, a photoresistis so patterned as to open the memory cell portion, followed by ionimplantation, for example, of As ions into the substrate underconditions of a dosage of 5×10¹⁵ atoms/cm² and an acceleration voltageof 50 KeV to form a semiconductor region 115.

Thereafter, an approximately 6 nm thick silicon nitride film and a 200nm thick silicon oxide film are formed, for example, by the CVD method,followed by anisotropic etching to form side wall spacers 152 on sidesurfaces of the gate electrode. In this way, when the approximately 6 nmthick silicon nitride film is formed at the side walls of the gateelectrode, an increase in thickness of the gate insulating film at theend of the gate electrode can be prevented. Eventually, the processingof a fine gate length becomes possible, thus realizing a high degree ofintegration.

As shown in FIG. 44, the polysilicon film 150 and the silicon nitridefilm 151, and the semiconductor substrate 1 not covered with the sidewall spacers 152 are scraped off by anisotropic dry etching, therebyforming about 0.35 μm deep grooves self-alignedly relative to the sidewall spacers. Thereafter, a silicon oxide film 153 serving as aninsulating film is formed by oxidation in the groove portions A siliconoxide film 154 serving as an insulating film is attached (deposited) bythe CVD method, after which the silicon oxide film is scraped off by theCMP technique for planarization to an extent of the silicon nitride film151 on the gate electrode. Thus, the silicon oxide film 154 which isburied between the side wall spacers is formed. In this manner,isolation regions made of the silicon oxide film can be formed. Theisolation regions formed here are simultaneously formed in theperipheral circuit region, unlike Embodiments 1 to 3.

As shown in FIG. 45., the silicon nitride film is removed by means ofhot phosphoric acid, after which a second polysilicon oxide film isattached (deposited) on the entire surface, for example, by the CVDmethod, followed by processing in a photoetching step to provide asecond floating gate electrode in the memory cell portion while coveringthe peripheral circuit portion.

Thereafter, an interlayer insulating film 121 made of silicon oxidefilm/silicon nitride film/silicon oxide film/silicon nitride film isattached (deposited). The interlayer insulating film is removed, by aphotoetching Step, partially at portions corresponding to the gateelectrodes of the transistor of the peripheral circuit and the selectivetransistor, not shown.

Next, as shown in FIG. 46 a third polysilicon film 122 and a WSi₂ film123, and a silicon oxide film 124 formed by the CVD method aresuccessively formed on the interlayer insulating film 121.

Next, as shown in FIG. 47, the silicon oxide film 124 is subjected topatterning by a photoetching step so as to provide a control gateelectrode in the memory cell portion and gate electrodes in theperipheral circuit portion. Using a mask formed of the silicon oxidefilm, the WSi₂ film 123, third polysilicon film 122, interlayerinsulating film 121 and first and second polysilicon films 111, 120 aresuccessively removed by etching. The resultant gate electrodes form afloating gate electrode and a control gate electrode in the memory cellportion, and also gate electrodes in the peripheral circuit portions andselective transistor portion. The gate electrodes of the transistor inthe peripheral circuit portion and the selective transistor are formedsuch that the third-polysilicon film 122 and the second polysilicon film120 are electrically connected at the portion where the interlayerinsulating film 121 is opened.

As shown in FIG. 47, a photoresist is so patterned as to open the MOStransistor portion of the peripheral circuit portion, followed by ionimplantation, for example, of phosphorus (P) ions into the substrateunder conditions of a dosage of 5×10¹³ atoms/cm² and an accelerationvoltage of 100 keV and thermal diffusion at 850° C. to form an N-typelow concentration semiconductor region 125 of the peripheral highwithstand voltage MOS transistor portion. Subsequently, the photoresistis so patterned as to form an N-type low concentration semiconductorregion of a low withstand voltage type including the selectivetransistor.

As shown in FIG. 48, a silicon oxide film serving as an insulting filmis attached (deposited) by the CVD method and is subjected toanisotropic dry etching to form side wall spacers 116 on the sidesurfaces of the gate. Thereafter, a photoresist is so patterned as toopen the peripheral circuit portion, followed by ion implantation, forexample, of As ions into the substrate under conditions of a dosage of5×10¹³ atoms/cm² and an acceleration voltage of 50 keV to form N-typehigh concentration semiconductor regions 127 of the MOS transistorportion and the selective transistor.

In subsequent steps, as shown in FIG. 49, there can be obtained astructure wherein the gate electrodes of all of the transistors areoffset with the isolation regions through the formation of a siliconoxide film by the CVD method and the interlayer insulating film 128 madeof phosphate glass, the plug electrode (not shown) within the contacthole, and the metal wires 130.

In this embodiment, after the formation of the impurity semiconductorregion of the memory cell, the impurity semiconductor region of theperipheral circuit portion is formed.

(Embodiment 5)

In Embodiments 1 to 4, the isolation of the memory cells makes use ofthe structure which is self-alignedly formed after processing of thefloating gate electrodes of the memory cells. The AND-type flash memoryof Embodiment 5 differs from the foregoing embodiments in that theisolation region is formed prior to the formation of the gate electrodesof the memory cells. In Embodiments 1 to 4, binary (1 bit) informationis memorized in the memory, whereas in Embodiment 5, there is adopted acircuit system of a so-called multiple state logic memory whereinquaternary (2 bits) information is memorized in one memory cell.

The planar structure of the AND-type flash memory, i.e. a multiple statelogic memory-based AND-type flash memory, of this embodiment isillustrated with reference to FIG. 1 of Embodiment 1.

The AND-type flash memory of this embodiment is Provided with a memoryarray MEMARRAY, a latch circuit LATCH, and a column decoder XDEC, likeEmbodiment 1. The memory array MEMARRAY has memory cells located in amatrix of rows and columns. A plurality of word lines extend along thedirection of the rows of the memory cells, and a plurality of data linesextend along the direction of columns. Eight thousand memory cells areconnected to at least one word line. Since one memory cell has a memorycapacity of 2 bits, and AND-type flash memory cell of this embodimenthas a memory capacity corresponding to 2 kB per 8 thousand memory cells.At least one word line is selected from an address input Ax. An addressalong the column line, i.e. at least one data line, is connected with 16k memory cells. More particularly, the number of word lines in thisembodiment is 16 thousand. The memory capacity of the AND-type flashmemory of this embodiment becomes: 2 k×16 k bytes=32 megabytes (256 MB).The latch circuit LATCH has a length corresponding to 8 thousand (2kilobytes) cells.

Signals inputted from outside to the control circuit CNTRL, and addresssignals inputted to a column gate YGATE are similar to those ofEmbodiment 1. The data input and output circuit and the memory cellselection circuit in the column direction are also similar to those ofEmbodiment 1. Moreover, the bit line voltage control circuit DISCHARGEand the internal voltage generating circuit CPC are also similar tothose of Embodiment 1. Accordingly, these are not described again.

The circuit arrangement of the AND-type flash memory cell of thisembodiment is similar to that shown in FIG. 2 of Embodiment 1, theconnections of the respective members are similar to those ofEmbodiment 1. Accordingly, their illustration is omitted.

Next, the multiple state logic memory system of the AND-type flashmemory of this embodiment will be described.

In the AND-type flash memory of the embodiment, threshold values afterwrite and erase operations are altered from those of known AND-typesystems. Recording of information is performed, in the same manner as inthe prior art, by the presence or absence of electrons injected from thesemiconductor substrate via the tunnel oxide film. However, with asystem where information is written by release of electrons, a thresholdvoltage of the transistor after the release varies significantly, whichis not appropriate for the multiple state system whose threshold widthis narrow. In the AND-type flash memory of this embodiment, there isused a system where information is written by injection of electronsfrom the substrate and threshold levels are made uniform, thus beingsuitable for a multiple state system whose threshold width is narrow.Accordingly, where information is written or where electrons areinjected into the floating gate electrode, a subsequent thresholdvoltage of the transistor becomes high. On the other hand, wheninformation is erased or where electrons are released, a subsequentthreshold voltage becomes low.

FIG. 50 is a schematic view showing how the threshold level differsdepending on the quantity of injected electrons, in which the ordinateindicates a threshold level and the abscissa indicates an amount. Ifthree voltages, for example, of 15, 16 and 17 V are applied to thecontrol gate electrode over a given time as a write control voltage,electrons which are charged depending on the voltage are injected intothe floating gate electrode from the substrate. This is shown in FIG.50. In FIG. 50, the respective threshold voltages depending on theamount of charges are exemplified as distributions having peaks at 2.8V, 3.4 V and 5V. On the other hand, a threshold level in the case whereelectrons are released is distributed as having a peak at 1.5 V.Accordingly, the states of electrons stored in the floating gateelectrode, i.e, the states where threshold levels differ from oneanother, are clearly distinguishable. More particularly, the respectivestates can be logically distinguished from one another by finding ON/OFFstates of the transistor of a memory cell wherein reference voltages areset at 2.4V, 3.2 V and 4.0V, respectively. Such distinguishable statescorrespond to four states of 2 bits (00, 01, 10, 11), respectively,enabling two bit memories in one memory cell. In this case, the statewhere electrons are released (wherein a threshold level has a peak at1.5 V) can correspond to “11”, the state where the peak of a thresholdlevel is at 2.8 V corresponds to “10”, the state where the peak of athreshold level is at 3.4 V corresponds to “00”, and the state where thepeak of a threshold level is at 5 V corresponds to “01”, respectively.

Next, read, write and erase operations of data—memorized in a memorycell will be described. FIG. 51 is a table of control voltages appliedto a memory cell at the time of read, write and erase operations of dataperformed in this embodiment along with schematic views of a memorycell. Table 2 shows the states of operations of the respective membersin FIG. 2 at the time of read, write and erase operations of dataperformed in this embodiment.

TABLE 2 Read Write Erase W11 4/2 V 15/16/17 V −16 V W12   0 V 4.5 V  0 VW21   0 V   0 V  0 V W22   0 V   0 V  0 V GD1   1 V   0 V  2 V GD2   1 V6.5 V  2 V D11   1 V   0 V  2 V D12   1 V 6.5 V  2 V D21 OPEN OPEN OPEND22 OPEN OPEN OPEN SiD1 3.3 V  10 V  3.3 V SiD2   0 V   0 V  0 V SiS13.3 V   0 V  3.3 V SiS2   0 V   0 V  0 V DPW   0 V   0 V  2 V

The erase operation of data memorized in memory cells will be describedfirst. In the following example of the erase operation, the operationsin a selected block (e.g. BL1 in FIG. 2) will be described.

As shown in the Erase section of FIG. 51, 2.0 V is applied to the sourceand drain regions and the substrate, and −16V is applied to the controlgate electrode which is a selected word line (selected word). On theother hand, a non-selected word line (non-selected word) is suppliedwith Vss (0 V). In this state, if the selected word line is taken as W11in FIG. 2 and the non-selected word line is taken as W12 in FIG. 2, theerase operation can be realized by keeping the voltages of therespective members as indicated in the Erase column in Table 2.

More particularly, the gates SiS1 and SiD1 of the selective transistorsSS11, SS12, SD11 and SD12 are, respectively, supplied with 3.3V to causeall the selective transistors connected thereto to be turned on. At thesame time, the potential of the global data lines GD1, GD2 and thecommon source line Vs2 is kept at 2V to set the voltage of the localdata lines D11, D12 and the local source lines S11, S12 at 2V. Moreover,the word line W11 selected by means of XDEC1 and the non-selected wordline W12 are, respectively, supplied with voltages of −16V and 0V for agiven time. At that time, voltages of 2V and 3V or over are applied tothe P-type well region and the N-type well region therebeneath,respectively.

The electrons stored in the floating gate electrodes of the memory cellsplaced in this condition behave in the following manner. Moreparticularly, the electrons stored in the floating gate electrodes ofall the memory cells connected to the word line W11 suffer the action ofan electric field depending on the difference in potential (18 V)between the substrate and the control gate electrode, and are releasedfrom the floating gate electrodes to the substrate. On the other hand,with the memory cells connected to the non-selected word line W12wherein W12 is, at 0 V, an electric field sufficient for the release tothe substrate is not applied to the electrons of the floating gateelectrodes, permitting the electrons to remain as they are. That is, theerase operation is performed on all the memory cells connected to W11,and information is not rewritten with respect to all the memory cellsconnected to W12. The threshold voltage of the memory cells on theselected word line W11 becomes low owing to the erase operation, and thethreshold voltage has such a distribution that its peak is in thevicinity of 1.5 V.

It will be noted that 0 V may be applied to SiS1 and SiS2 to turn allthe selective transistors connected thereto to an off state, under whichD11, D12 and S11, S12 are set in a floating state simultaneously withthe substrate potential being set at 2V. In such a state as mentionedabove, all the memory cells connected to W11 are subject to the eraseoperation, and information is not rewritten with respect to all thememory cells connected to W12.

In this erase operation, the electrons are released from the floatinggate electrodes throughout the entire surface of the tunnel oxide filmas will be described later. This makes the provision of a local path ofa tunnel current unnecessary, enabling one to make fine memory cells anda high degree of integration of the AND flash memory. In addition, thedegradation of the tunnel oxide film caused by the tunnel current can besuppressed to a minimum, thereby improving the reliability of theAND-type flash memory.

With regard to the non-selected memory block (e.g. BL2), 0 V is appliedto SiS2 and SiD2 to turn all the selective transistors connected theretooff, so that D21, D22 and S21, S22 are turned to floating state, and atthe same time, 0 V is applied to the word lines W21, W22, disenablinginformation to be rewritten.

Next, the operation of writing data in memory cells will described. Inthe following illustration of the write operation, operations of aselected block (e.g. BL1 in FIG. 2) will be described.

As shown in the write column in FIG. 51, while three voltages rangingfrom 14.9 V to 17 V are applied to a selected word line, a voltage of4.5 V is applied to a non-selected line. The source regions of thememory cells connected to the selected word line are opened, and thesource regions of the memory cells connected to the non-selected wordline are kept at Vss (0 V), under which a data line (write data)connected to memory cells to be written is kept at Vss (0 V), and avoltage of 6.5 V is applied to a data line (non-write data) connected tomemory cells not to be written. If the selected memory cell is taken asM11 and non-selected memory cells are taken as the other memory cellsM12, M21 and M22, such a state can be realized while keeping therespective members at the voltages indicated in the write column inTable 2.

More particularly, the gates SiD1 of the selective transistors SD11,SD12 are supplied with 10V to turn SD11 and SD12 on, and, at the sametime, the voltages of the global data lines GD1, GD2 are kept at 6.5 V,respectively. In this way, the voltage of the data line D11 (write dataline) of the selected memory cell M11 is set at a voltage of GD1 viaSD1, i.e. at 0 V, and the voltage of the data line D12 (non-write dataline) connected to the non-selected memory cells is set at a voltage ofGD2 via SD12, i.e. at 6.5 V. The gates SiS1 of the selective transistorsSS11, SS12 are supplied with 0 V to turn SS11 and SS12 off, so that thesource lines S11 and S12 are turned to a floating state (open). It willbe noted that S11 and S12 maybe kept at Vss (0 V). Further, while threevoltages within a range of 14.9 V to 17 V are successively applied tothe word line W11 selected by XDEC1 for given times, a voltage of 4.5 Vis applied to the non-selected word line. At this stage, a voltage of 0V is applied to the P-type well region.

The floating gate electrode of the selected memory cell M11 in such astate as set out above is injected with electrons in an amount ofcharges corresponding to the voltage of the word line W11, andinformation to be memorized is divided into four states including thethree voltages of W11 and a state not written. At the time whenelectrons are injected into the floating gate electrode by applicationof voltages of 14.9 V to 17V to W11, the source region is in an OPENstate and the drain region (data line) is at 0 V, so that an electronchannel is formed on the entire surface beneath the tunnel oxide film,and, thus, a tunnel current passes through the entire surface of thetunnel oxide film. As can be seen, it is not necessary to provide alocal region for injecting the tunnel current, thus enabling one to makefine memory cells and realize a high degree of integration of theAND-type flash memory. Moreover, the tunnel current density can be madesmall to suppress the degradation of the tunnel oxide film, therebyimproving the reliability of the AND-type flash memory.

On the other hand, in the non-selected memory cells, a great voltage isnot applied between the word line (control gate electrode) and thesubstrate, under which condition no tunnel current passes to injectelectrons. In this way, information of the non-selected memory cells isheld. It should be noted that when the selective transistors SS11, SS12at the side of the source region are turned to an off state, 6.5 V whichis applied to the drain region (diffused layer) (D12) of thenon-selective transistors charges the source region (diffused region)(S12) within a short time, thereby forming an inverted layer throughoutthe channel region surface. Accordingly, no high electric field isapplied to the tunnel oxide film at that portion. This prevents anunnecessary write operation to the non-selected memory cells, and thevoltages of the source and drain regions are at the same level, makingit unnecessary to secure the high withstand voltage of the drain. Inthis system, memory operations are possible in fine gates wherein thewithstand voltage between the source/drain becomes low, thus making itunnecessary to secure the drain withstand voltage at this portion. Moreparticularly, it is not necessary to separately form the source regionand the drain region and it is possible to arrange a shallow junctionand symmetric structure. This makes for easy processes, such as ionimplantation, thermal treatment and the like, and the process margin canbe reduced, while the memory cell size can be made small.

It will be noted that there arises a difference in potential of 6.5 Vbetween the semiconductor region (source region or drain region) of theselected memory cell and the semiconductor region of the adjacentnon-selected memory cell, whereupon the word line is supplied with avoltage of 17V at a maximum, so that the isolation withstand voltage ofthe memory cells should be at 18 V or over. Moreover, there arises adifference in potential of about 6.5 V between the selected cells andthe non-selected cells in the selective transistor, and 10 V is appliedto the gate of the selective transistor. This makes it necessary for theisolation withstand voltage of the, selective transistors to be 12 V orover. However, in the AND-type flash memory of this embodiment, thememory cells are isolated from one another by shallow groove isolationsburied with an insulating film in a manner described hereinafter, thussecuring a necessary withstand voltage.

Next, a sequence of write operations will be described. FIG. 52 is aflow chart showing an example a write sequence.

Initially, write data is latched in a latch circuit LATCH (step A).Next, “01” data is written (step B). “01” data is recorded as athreshold distribution having a peak in the vicinity of 5 V as describedbefore, and because there is some distribution, whether or not it isnormally written is verified (step C). The verify voltage is set at 4.5V. With the case where data is not normally written (fail), the “01”data is again written by returning to step B.

If it is verified that “01” data is normally written, “00” data is thenwritten (step D). “00” data is recorded as a threshold distributionhaving a peak in the vicinity of 3.6 V as mentioned before. However, ifthere is some distribution, it is verified whether or not it is normallywritten (step E). The verify voltage is set at 3.6 V. With the casewhere data is not normally written (fail), the “00” data is againwritten by returning to the step D.

If it is verified that the “00” data is normally written in the step E,“10” data is written (step F). “10” data is recorded as a thresholddistribution having a peak in the vicinity of 2.8 V. Since there is somedistribution, it is verified whether or not data is normally written(step G). The verify voltage is set at 2.8 V. If data is not normallywritten, the “10” data is again written by returning to the step F.

Next, all bits are weakly written (step H), by which all the bits arewritten.

Erratic and disturb conditions are detected. First, the disturbdetection of the “11” word is performed (step I), followed by erraticdetection of the “10” word (step J) and erratic detection of the “00”word (step K). The respective detection voltages are at 2.1 V, 3.1 V and3.9 V. If an erratic or disturb condition has been detected in the stepsI to K (fail), the written data is erased (step L), and the writing of“01” data is started over again after returning to the step B. If allthe detections are passed, the write operation is completed (step M).

In this manner, when a write operation is performed in the order ofhigher threshold distributions, a word disturb condition in the statesof “00” and “11” can be mitigated.

Next, a readout operation for the data memorized in the memory cellswill be described. In the following readout operation, the operation ofa selected block (e.g. BL1 in FIG. 2) will be considered.

As shown in the read column in FIG. 51, while three voltages within arange of 2.4 V to 4.0 V are applied to a word line, a voltage of Vss (0V) is applied to a non-selected line. The source regions of memory cellsare kept at a voltage of Vss (0 V), and the drain regions are held at1.0 V. The potential of the substrate is set at Vss (0 V). Such statescan be realized by keeping the voltages of the respective members atlevels indicated in the read column of Table 2 when the selected cell istaken as M11 and the non-selected memory cells are taken as the othermemory cells M12, M21, M22 in FIG. 2.

More particularly, the voltage of selected word lines is controlled bymeans of XDEC1 at three levels within a range of 2.4 V to 4.0 V, and thegates SiS1 and SiD1 of the selective transistors are supplied with 3.3 Vto turn all the transistors connected thereto to an ON state. Thevoltage of the global data line is set at 1 V, and the voltage of thecommon source line is set at 0 V. As a result, voltages of 1 V and 0 Vare, respectively, supplied to the local data line and the local sourceline via the selective transistors. Readout is performed by use of achannel current corresponding to the threshold voltage of the memorycells on the selected word line, and a similar detection is performed byapplication of 2 V to the selected word line. In this way, quaternarythreshold voltages can be detected. It will be noted that readout iseffected in the order of the lower threshold voltages.

In the write, erase and read operations, when the selective transistorsSD21, SD22 and SS21, SS22 in the non-selected block are all turned off,the disturb phenomenon ascribed to the bit lines in the respectiveoperations can be prevented.

Next, the plan layout of the AND-type flash memory of this embodimentwill be described.

FIG. 53 is a plan view showing part of the structure of memory cells andselective transistors of the AND-type memory flash of this embodiment.In FIG. 53, there are shown a portion of the selective transistors SD11,SD12 at the side of the drain region (the side of the data lines D11,D12) and a portion of the memory cell array MEMARRAY shown in FIG. 2while omitting the structure at the side of SS11, SS12.

The AND-type flash memory of this embodiment has memory cells M (MM11 toM22, N11 to N22), selective transistors SD (SD11, SD12), and selectivetransistors SS (SS11, SS12) (not shown), like Embodiment 1. Moreover,like Embodiment 1, the memory has word lines 301 (8) (word wires W11 toW22) serving as control gate electrodes of the memory cells M, elementisolation regions 302 (19) source regions 303 (11), drain regions 304(10), and element isolation regions 305 (5). Accordingly, theillustration of these is omitted. It should be noted here that theelement isolation regions 302 (19), 305(5) are, respectively, formedprior to the processing of the floating gate electrodes of the memory.The source regions 11, 303 and the drain regions 10, 304, respectively,have a shallow junction and a symmetric structure, like the foregoingEmbodiments 1 to 4.

In FIG. 53, second-layer metal wires M2 serving as global data lines GD(GD1, GD2) indicated by the broken line are connected to the drainregions 307 of the selective transistors SD via contact holes 306, andthe source regions 308 (21) of the selective transistors SD areconnected to the drain regions 304 (10). On the other hand, thesecond-layer metal wires M2 serving as common source lines indicated bythe broken line in the figure are connected to first-layer metal wiresM1 via through-holes 316 at intervals equal to those of 128 memory localsource lines. The first-layer metal wire M1 is connected via a contacthole (not shown) to the source region 303(11) of the selectivetransistor SS (not shown) and the drain region (not shown) of theselective transistor SS (not shown) is connected to the source region303(11) in the memory cell block. Such a connection arrangement asmentioned above is similar to that of Embodiment 1 wherein the sourceregions 308 (212) of the selective transistors SD are connected to thedrain regions 304(10). The common source lines are led in the directionof the data line by means of the second metal wire M2, but may be led inthe direction of the word line by means of the first metal wire.

The gate electrode 312 of each selective transistor SD is constituted ofa wiring material of the word line 301(8) above the floating gate. Thisis true of the gate electrode material of the selective transistor SS(not shown).

Further, buffer gates 31 are formed between the selective transistorsSD, SS and the memory cell M in order to separate the transistors. Thebuffer gate 315 is constituted of the floating gate electrode and theword line as described hereinafter. The respective electrode materialsare connected to the metal wires via contact holes, and are electricallyconnected to p-type wells 208, with which memory cells are formed, andare fixed at the same potential. The local bit lines 304(10) at the sideof the selective transistors SD pass below the region of the buffergates 315 and are connected to the source regions 308 (21) of theselective transistors SD, and the local source lines 303(11) terminateat the lower portion of the buffer gate 315 regions. Like Embodiment 1,the selective transistor SS side is also arranged so that the local bitlines and the local source lines are reversed.

The transistor regions of the memory cell M are those regionsindicated_by the floating gate electrodes 314 (3, 7). Each floating gateelectrode 314 (3, 7) is formed beneath the word line 301(8), and has adouble-layered structure including a first-layer floating gate electrode314 a(3) and a second-layer floating gate electrode 314 b(7). Thefirst-layer floating gate electrode 314 a(3) is defined between thesource region 303(11) and the drain region 304(10) of a memory cell. Thesecond-layer floating gate electrode 314 b(7) is arranged above thefirst-layer floating gate electrode 314 a(3) and defines capacitancevalues of the word line 301(8) and the floating gate electrode 314(3,7).

Although not shown in the figure, the word line 301(8) is connected toan X decoder via a contact hole and the first-layer metal wire M1. The Xdecoder is provided at opposite sides of the memory mat, and the wordlines are alternately connected to these X-decoders.

The sectional structure of the AND-type flash memory of this embodimentwill be described. FIG. 54 is a sectional view showing an example of theAND-type flash memory of the embodiment. In FIG. 54, a region Aindicates a peripheral circuit-forming region (peripheral circuitportion), and regions B and C indicate a memory cell-forming region(memory cell portion) which is a memory cell array region. The memorycells indicated in the region B are in section taken along the line B—Bin FIG. 53 or in a direction parallel to the word line −301 (8), and thememory cells indicated in the region C are in section taken along theline C—C indicated in FIG. 53 or in a direction parallel to the datalines (drain diffusion region 304(10)). In the following description ofthe sectional structure, a main part is illustrated, and a more detaileddescription is provided in the illustration of a fabrication process tobe described later.

Element isolation regions 204 (305(5)) having a shallow groove isolationstructure are formed on a main surface of a semiconductor substrate 201.In the vicinity of the main surface, there are formed p-type wellregions 208 and n-type well regions 207. Part of the p-type well regions(especially, the p-type well region 208 of the memory cell region) isisolated from the p-type semiconductor substrate 201 by means of n-typewell regions 206 formed in a deeper region to surround the p-type wellregion 208 therewith.

The element isolation regions 201 isolate memory cells and MISFET's of aperipheral circuit from each other as will be described later. Althoughnot shown in the figure, a channel stopper region made of a p-typeimpurity may be formed therebeneath to more effectively isolate theelements. The minimum width of the element isolation region 204 is, forexample, 0.35 μm.

A memory cell M and a selective transistor SD are formed on the mainsurface of the p-type well region 208 of the memory cell-forming region(regions B and C), with a buffer gate 315 being formed on the mainsurface.

The memory cell M has a floating gate electrode formed on a tunnel oxidefilm 210, which consists of an about 9.5 μm thick gate insulating film,and including a first floating gate electrode 211 and a second floatinggate electrode 218. The first floating gate electrode 211 is made of anabout 100 nm thick polysilicon layer with its gate length being at 0.25μm, for example. The first floating gate electrode 211 is covered at theside surfaces thereof with a side wall spacer 214 made of an insulatingfilm. An insulating film 216 is formed on the isolation region 204 atthe side surface of the insulating film (side wall spacer) 214. Thesecond floating gate electrode 218 is formed on the first floating gateelectrode and is made of an about 40 nm thick polysilicon layer. Thesecond floating gate electrode 218 and the first floating gate electrode211 are electrically connected. The second floating gate electrode has awidth, for example, of 0.85 μm.

An interlayer insulating film 219 composed of a composite film ofsilicon oxide film/silicon nitride/silicon oxide film/silicon nitridefilm having thicknesses of 5/7/3/11 nm, respectively, is formed on thesecond floating gate electrode 218 and the insulating film 216. Acontrol gate electrode (word line 301(8))) made of a polysilicon layer223 and a WSi₂ layer 224 having, for example, thickness of 50 and 120nm, respectively, is formed on the interlayer insulating film 219. Abovethe control gate electrode, there is formed an insulating film 225having a thickness of about 50 nm by the CVD method.

A source region (source line 303(11)) and a drain region (data line304(10)) of the memory cell are formed in the p-type well region beneaththe first floating gate electrode 211. The semiconductor regions303(11), 304(10) of the memory cell are electrically connected to theselective transistor SD or SS as described before.

The selective transistor SD has a gate electrode formed on the gateinsulating film 220 and is made of the polysilicon layer 223 and theWSi₂ layer 224. As described hereinafter, the isolation region 302(19)of the selective transistor SD or SS is formed in the same step as theisolation region 305 of the memory cell, with the isolation width beingat 0.35 μm. The gate oxide film 220 has a thickness of 25 nm and isformed in the same step as the gate oxide film 220 of the peripheralcircuit region. The gate width of the selective transistors is, forexample, 0.75 μm.

A buffer gate electrode 315 is formed between the memory cell M and theselective transistor SD. The buffer gate electrode 315 has such astructure that the materials made of the first gate electrode 211 andthe second floating gate electrode 218 and the materials of the wordline made of the polysilicon layer 223 and the WSi₂ layer 224 arepartially superposed, and is constituted of the tunnel oxide film 210below the material of the first floating gate electrode 211 and the gateinsulating film between the word line material and the p-type wellregion 208. The buffer gate electrode 315 is electrically connected tothe p-type well region 208 and is fixed at a well region potential (orsubstrate potential).

A p-type semiconductor region 228 is formed between the memory cells M,so that the memory cells are isolated in the column direction. There areformed a low concentration n-type impurity semiconductor region 227 anda high concentration n-type impurity semiconductor region 232 betweenthe buffer gate electrode 315 and the selective transistor SD. Therespective gate sizes are such that the word line width of the memorycells is, for example, at 0.25 μm with pitches being, for example, at0.9 μm.

In the peripheral circuit region (region A), there are formed n channelMISFET's Qn1, Qn2 and a p channel MISFET Qp. The gate electrodes of thechannel MISFET's Qn1, Qn2 and a p channel MISFET Qp are formed on thegate insulating film 220 and made of the polysilicon layer 223 and theWSi₂ layer 224.

An insulating film 230 is formed over the memory cell M, buffer gateelectrode 315, selective transistor SD, n-channel MISFET's Qn1, Qn2, andp channel MISFET Qp8, on which there are further formed metal wires M2(not shown) which result in data lines arranged at right angles relativeto the first-layer wire M1 and the control gate electrode.

Next, the fabrication method of the AND-type flash memory of thisembodiment is described with reference to FIGS. 55 to 77. FIGS. 55 to 77are sectional or plan views showing in sequence an example of thefabrication steps of the AND-type flash memory of Embodiment 5. It willbe noted that in plan view, the memory cell region (B, C regions) aloneis shown.

Initially, as shown in FIG. 55, the silicon oxide film 202 and thesilicon nitride film 203 are attached (deposited) on the p-typesemiconductor substrate 201, after which a photoresist is so patternedas to open a region which results in the element isolation region 204,followed by removal of the silicon nitride film 203 by dry etching usingthe photoresist pattern. After removal of the silicon oxide film 202,the semiconductor substrate 201 is dry etched to a depth of about 0.35μm to form a shallow groove in a region which results in the elementisolation region 204.

Next, the inside of the shallow groove of the semiconductor substrate201 is oxidized, although not shown in the figures, to form anapproximately 30 nm thick silicon oxide film, followed by attachment(deposition) of an insulating film (silicon oxide film) to a thicknessof approximately 0.4 μm by the CVD method. After thermal oxidation, asilicon nitride film is formed, by the CVD method, over the entiresurface of the insulating film to a thickness of approximately 200 nm,although not shown in the figures, and is so patterned by photoetchingthat the silicon nitride film is left only on a portion which becomesthe wide element isolation region 204. Thereafter, the silicon nitridefilm and the insulating film are polished and planarized by the CMP(Chemical Mechanical Polishing) method to bury the shallow groove withthe insulating film. The polishing is continued until the siliconnitride film 203 is exposed. At this time, the silicon nitride film 203functions as a stopper for the polishing by CMP.

As shown in FIG. 56, the silicon nitride film 203 is removed by wetetching, for example, with hot phosphoric acid. In this way, theisolation regions 204 of the peripheral circuit region (A region) andmemory cell and selective transistor regions (regions A and B) aresimultaneously formed. Thus, the isolation regions 204 wherein theinsulating film (silicon oxide film) is buried in the shallow groovesare formed. The plan view of the semiconductor substrate 201 wherein theelement isolation regions 204 are formed is shown in FIG. 57 withrespect to the memory cell regions (regions B, C). The width of theactive regions sandwiched between the isolation regions 204 is, forexample, 0.75 μm, and the width of the isolation region 204 is, forexample, 0.35 μm. As will become clear hereinafter, the isolationregions 204 of the memory cell portion and the selective transistorportion are formed simultaneously in this step.

Subsequently, a sacrificial oxide film 209 is formed on the surface ofthe semiconductor substrate 201, followed by ion implantation ofphosphorus (P) into the semi-conductor substrate 201 by a high energythrough a photoresist mask to form n-type well regions in a deep region.Next, phosphorus is ion implanted through the photoresist mask severaltimes by dividing the energy and dosage into portions to form an n-typewell region 207. Thereafter, boron (B) is ion implanted through thephotoresist mask several times with an energy and a dosage being dividedinto portions to form p-type well regions 208. Although not shown in thefigure, boron may be ion implanted into the memory cell and selectivetransistor portions to form channel stopper regions. Likewise, boron maybe ion implanted into the memory cell portion to form a channel region.

Next, as shown in FIG. 58, the sacrificial oxide film 209 is removed,followed by thermal oxidation to form a silicon oxide film 210 having athickness, for example, of 9.5 nm. Thereafter, a non-doped polysiliconfilm (conductive film) 211 having a thickness, for example, of 100 nmand a silicon nitride film (insulating film) 212 having a thickness, forexample, of 200 nm are successively attached (deposited) by the CVDmethod. The polysilicon film 211 in the regions B, C subsequentlyresults in first floating gate electrodes.

A photoresist is patterned by a photoetching process so that the gatelength of the first floating gate electrode is regulated in the memorycells and the semiconductor substrate 201 is protected on the surfacethereof in the selective transistor portion (part of the region C) andthe peripheral circuit portion (region A), followed by dry etching ofthe silicon nitride film 212. Thereafter, the resist is removed, and thepolysilicon film 211 is dry etched through the mask of the siliconnitride film 212. Since, the selective transistor portion and theperipheral circuit portion are covered with the polysilicon film 211 andthe silicon nitride film 212, the impurity concentration anddistribution of the semiconductor substrate 201 are not influenced bythe impurity implanted in the ion implantation step described below.Moreover, the surface of the semiconductor substrate 210 at theselective transistor portion and the peripheral circuit portion is notdamaged in the CMP step described hereinafter. Eventually, theperformance of the AND-type flash memory is enhanced, with the stepsbeing stabilized.

Next, arsenic (As) ions are subjected to ion implantation into thesubstrate under conditions of a dosage of 1×10¹⁴ atoms/cm² and anacceleration voltage of 40 KeV to form semiconductor regions 213 ofmemory cells.

A plan view of the thus formed polysilicon film 211 and the siliconnitride film 212 and the memory cell semiconductor regions 213 is shownin FIG. 59. The polysilicon film 211 and the upper silicon nitride film212 serving as the first floating gate electrode are so arranged in theform of a striped column pattern (a line pattern in the columndirection) in the memory cell portion as to protect (cover) theselective transistor portion. Thus, recesses are formed in the columndirection between the column patterns. The line width of the siliconnitride film 212 in the memory mat is, for example, at 0.25 μm, with itsintervals being, for example, at 0.85 μm. The polysilicon film 211 andthe silicon nitride film 212 and the memory cell semiconductor regions213 are formed in the active region between the isolation regions 204.The semiconductor regions 213 of the memory cells serve as the sourceregion 303(11) and the drain region 308(10) where the side (drain region304(10)) which is subsequently connected to the drain region 308(21) ofthe selective semiconductor SD is formed to be long, and the side notconnected (source region 303(11)) is formed to be short.

Next, as shown in FIG. 60, a silicon oxide film, which consists of anabout 150 nm thick insulating film, is formed by the CVD method, and issubjected to anisotropic etching to form a side wall spacer 214 on theside surfaces (side walls) of the polysilicon film 211 and the siliconnitride film 212.

Thereafter, arsenic (As) ions are, for example, implanted into thesubstrate under conditions of a dosage of 1×10¹⁵ atoms/cm² and anacceleration voltage of 40 keV to form, semiconductor regions 215 ofmemory cells In these ion implantation steps, the silicon nitride film212 serves as a mask, so that unnecessary implantation into the floatinggate and the peripheral circuit portion does not take place. Thus, thesource and drain regions 213, 215 are formed in the same ionimplantation step and are formed in the form of a symmetric structureand a shallow junction.

Next, as shown in FIG. 61, a silicon oxide film 216, which consists, forexample, of a 500 nm thick insulating film, is attached (deposited) bythe CVD method. By the deposition, the irregularities formed by thepolysilicon film 211 and the silicon nitride film 212, which have beenprocessed in the striped column pattern in the memory cell region, arefilled up.

As shown in FIG. 62, the silicon oxide film 216 is polished to a levelof 380 nm according to the CMP technique, to form the silicon oxide film216 in such a way that the surface positions of the silicon oxide film216 between the column patterns, wherein the film becomes a first gateelectrode, and on the isolation regions 204 become substantially at thesame level. That is, the surface positions of the silicon oxide film 216are formed so as to be substantially uniform.

Thereafter, as shown in FIG. 63, the silicon oxide film 216 is etched bydry etching the silicon nitride film 212 while keeping the surfaceuniformity. It will be noted that the dry etching is effected underconditions where the etching rates of the silicon oxide film 216 and thesilicon nitride film 212 are almost the same. Although not criticallylimited, the silicon nitride film is etched to half the thicknessthereof by the dry etching. This is because if the thickness of thesilicon nitride film prior to the etching is so great as to bring abouttoo great a difference (step difference) between the surface positionsof the polysilicon film 211 and the silicon oxide film 216, as will bedescribed hereinafter, a difficulty is involved in processing of thepolysilicon film 216. Like Embodiments 1 to 4, the above-mentionedirregularities are filled up so that the silicon oxide film (insulatingfilm) 216 has surface positions in the memory cell portion which are atthe same level. The silicon nitride film 212 is used for the detectionof etching termination at the time of the dry etching of the uppersilicon oxide film. The silicon nitride film plays the role ofprotecting the floating gate electrodes from CMP and dry etching.Moreover, the peripheral circuit portion is also covered with thesilicon nitride film 212, so that scraping or dishing of the underlyingfilm caused by the etching does not occur. It will be noted that theetching is not limited to dry etching, but wet etching may be used.However, wet etching brings about a greater difference in etching ratethan dry etching depending on the film quality, and thus, dry etchingensures more uniformity in surface position of the silicon oxide film216 between the floating gate electrodes.

Next, as shown in FIG. 64, the silicon nitride film 212 is removed withhot phosphoric acid to expose the underlying polysilicon film.Thereafter, an approximately 40 nm thick phosphorus-doped polysiliconfilm 218 having an impurity concentration of about 4.7×10²⁰ atoms/cm³ isattached (deposited), for example, by the CVD method, followed byprocessing into a second floating gate electrode by a photoetching step.At this stage, the peripheral circuit portion and the selectivetransistor portions are covered and protected with the second floatinggate electrode. The surface position of the silicon oxide film 216 belowthe second floating gate electrode (polysilicon film 218) is so arrangedas to be higher than the surface position of the first floating gateelectrode (polysilicon film 211). In this way, the capacitances betweenthe second floating gate electrode and the source/drain regions 213,215, 10, 11 can be reduced, thereby improving the memory cellcharacteristics in flash memories having a plurality of thresholdvoltages as in this embodiment.

In this step, as shown in FIG. 65, the polysilicon film 218 covers, inthe memory cell portion, the polysilicon film 211 which results in thefirst floating gate electrode, and is arranged in the form of stripesextending over the silicon oxide film 216 and is arranged to protect(cover) the selective transistor portion. Within the memory mat, thewidth of the stripes, or the line width of the second floating gateelectrode is, for example, 0.85 μm, with their intervals being, forexample, 0.25 μm.

It is to be noted that at the time of the photoetching in this step, thesurface in which the phosphorus-doped polysilicon film 218 has beendeposited is buried with the silicon oxide film 216, ensuring highflatness. This makes it difficult to scatter exposed light duringphotolithography, thereby improving the processing accuracy with ease infineness As a result, the degree of integration of the AND-type flashmemory can be improved The capacitance between the floating gateelectrode 218 and the source/drain regions (semiconductor regions 213,215) can be reduced, with improved memory cell characteristics.

Next, as shown in FIG. 66, an interlayer insulating film 219 made, forexample, of silicon oxide film/silicon nitride film/silicon oxidefilm/silicon nitride film having thicknesses of 5/7/3/11 nm,respectively, is formed by the CVD method or the like, after which theinterlayer insulating film 219 of the peripheral circuit portion and theselective transistors are removed by a photoetching process.

At this stage, as shown in FIG. 67, the pattern 255 is arranged toprotect (cover) the memory mat therewith while taking, as a boundary,the vicinity of the central portion of the region, in which the buffergate electrode 315, existing between the region where there is formedthe memory cell portion, in which the first and second floating gateelectrodes are formed in the form of stripes, and the region where thereis formed the selective transistor SD, is formed.

Subsequently, a sacrificial oxide film is formed by thermal oxidation,although not shown in the figure, and ions are, respectively, implantedinto the region where there are formed n-channel MISFET's Qn1, Qn2 andp-channel MISFET Qp and the region where the selective transistor SD isformed to form channel regions, after which the sacrificial oxide filmis removed and a 25 nm thick oxide film 220 is formed by thermaloxidation. The oxide film 220 serves as a gate insulating film for then-channel MISFET's Qn1, Qn2 and p-channel MISFET Qp and the selectivetransistor SD.

Next, as shown in FIG. 68, there are successively formed by the CVDmethod an approximately 50 nm thick phosphorus-doped polysilicon film223 having an impurity concentration of about 4.7×10²⁰ atoms/cm³, anapproximately 100 nm thick WSi₂, film 224 and an approximately 150 nmthick silicon oxide film 225.

Then, a photoresist is patterned, through which the silicon oxide film225 is processed to obtain gate electrodes of the n-channel MISFET'sQn1, Qn2 and p-channel MISFET Qp, gate electrodes (312) of the selectivetransistors SD, and word lines (301(8)) of memory cells. The plan viewafter the processing is shown in FIG. 70. The n-Channel MISFET's Qn1,Qn2 have a minimum gate length, for example, of 1 μm, and the p-channelMISFET Qp has a minimum gate length, for example, of 1.1 μm. Theselective transistor SD has a gate length, for example, of 0.9 μm, andthe word line width (gate width) of the memory cells is, for example,0.25 μm. After removal of the resist, the WSi₂ film 224 and the thirdpolysilicon film 223 are successively processed through the mask of thesilicon oxide film 225. In this manner, the WSi₂ film 224 and the thirdpolysilicon film 223 result in gate electrodes of the n-channel MISFET'sQn1, Qn2 and p-channel MISFET Qp in the peripheral circuit region(region A), and also in the gate electrode (312) of the selectivetransistor SD and the word line (305(5), control gate electrode) of eachmemory cell. The gate length of the buffer gate electrode (315) then-channel MISFET's Qn1, Qn2 and p-channel MISFET Qp is determined inthis step Thus, there are formed control gate electrodes (word lines)305(5) extending along the row direction while being patterned in adirection vertical to the direction of extension of the column pattern.

Next, as shown in FIGS. 71 and 73, a photoresist PR is so patterned asto open the memory cell portion, after which the interlayer insulatingfilm 219, and the first and second polysilicon films 211, 218 aresuccessively processed through the mask of the photoresist PR and thesilicon oxide film 225 (FIG. 72). In this step, word lines 301,selective transistors SD and buffer gate electrodes 315 are formed. Asshown in FIG. 73, the patterning of the second photoresist is arrangedto open the memory cell portion on the buffer gate electrodes 315. Thepatterning is effected such that at the upper right portion of thebuffer gate electrode 315, the second floating electrode surface isexposed.

Thereafter, as shown in FIG. 72, a silicon oxide film having a thicknessof 10 nm is formed over the entire surface by the CVD method, afterwhich the photoresist is so patterned as to open the regions where then-channel MISFET's Qn1, Qn2 of the peripheral circuit portion areformed. Thereafter, for example, phosphorus (P) ions are implanted intothe substrate under conditions of a dosage of 2×10¹³ atoms/cm² and anacceleration voltage of 60 keV to form n-type low concentration impuritysemiconductor regions 227 of the n-channel MISFET's Qn1, Qn2 of theperipheral circuit portion and the selective transistor portion insidethe memory mat. Subsequently, BF₂ ions are, for example, implanted intothe substrate over the entire surface under conditions of a dosage of2×10¹² atoms/cm² and an acceleration voltage of 50 keV to form p-typelow concentration semiconductor regions 228 of the p-channel MISFET Qpof the peripheral circuit portion. At the same time, there are formed,by the implantation of the BF₂ ions, punch-through stopper regions(p-type semiconductor regions) 228 in the substrate regions sandwichedbetween the word lines of the memory cells and the source/drain regions.

Thereafter, as shown in FIG. 74, the substrate surface is oxidized to athickness of approximately 6 nm, after which an insulating film 230 madeof an approximately 20 nm thick silicon nitride film and anapproximately 200 nm thick silicon oxide film is formed by the CVDmethod, followed by anisotropic etching to form side wall spacers 230 onthe side surfaces of the gate electrodes. After attachment (deposition)of a 10 nm thick silicon oxide film by the CVD method, a photoresist isso patterned as to open the n-channel MISFET's Qn1, Qn2 of theperipheral circuit portion and the selective transistor SD, followed byimplantation, for example, of arsenic (As) ions into the substrate underconditions of a dosage of 5×10¹⁵ atoms/cm² and an acceleration voltageof 50 keV to form n-type high concentration semiconductor regions 232.Thus, the photoresist is so patterned as to open the p-channel MISFET Qpof the peripheral circuit portion, followed by implantation, forexample, of BF₂ ions into the substrate under conditions of a dosage of3×10¹⁵ atoms/cm² and an acceleration voltage of 50 keV to form a p-typehigh concentration semiconductor region 233.

As shown in FIG. 75, a 100 nm thick silicon oxide film 234 and phosphateglass (PSG) are formed by the CVD method and thermally treated at atemperature of 850° C. in an atmosphere of 1% of 0₂ for 20 minutes,followed by formation of a 800 nm thick PTEOS film (i.e. a silicon oxidefilm by a plasma CVD method using TEOS (tetramethoxysilane) as astarting material) and polishing by CMP. As a result, there can beformed an interlayer insulating film 235 made of the phosphate glass andthe PTEOS film.

A photoresist is subsequently patterned so that contact holes of asquare pattern are formed with a size of 0.38 μm in one side by dryetching. After irradiation with UV light, Ti (titanium)/TiN (titaniumnitride) films having thicknesses of 40 nm and 100 nm are formed bysputtering, followed by further formation of a 500 nm thick W (tungsten)film by the CVD method. Thereafter, the W film in the surface portion isremoved by dry etching. Eventually, there can be formed plug electrodesP shown in FIG. 54. Next, a metal layer made, for example, of films ofTi/Al—Cu/Ti/TiN is formed with thicknesses for example, of 10/200/10/75nm, respectively, followed by patterning to complete first-layer wiresM1. Hence, the AND-type flash memory of FIG. 54 is substantiallycompleted.

It will be noted that the above metal layer is not only patterned aswires for the peripheral circuit, but also is patterned so that theglobal data lines and the semiconductor regions of the selectivetransistors are rendered electrically conductive in the memory matportion. Also, lead wires are formed from the word lines of the memorymat portion to the decoder portions. As shown in FIG. 76, the contactholes 264 of the selective transistor portions have a pitch, forexample, of 1.1 μm, and the intervals of the first-layer wires M1 is,for example, 0.4 μm in the dock bone portion, and the pitch of thefirst-layer wires M1 is, for example, 1.1 μm. The intervals of thefirst-layer wires M1 at the word line-leading portions is, for example,at 0.42 μm in the dock bone portion, with a wire pitch being, forexample, 1.0 μm.

The first-layer wires may be provided in the form of lattices, as shown,on the memory cells. The formation of the lattices simplifies the CMPstep used in the step of forming the interlayer insulating film formedbetween the first-layer wires and the second-layer wires. Moreparticularly, the formation of the lattice-shaped wires (M1) on thememory cells contributes to the uniformity in irregularity of theinterlayer insulating film prior to CMP and can prevent dishing. If thelattice-shaped wires are not formed, it is unavoidable to form a recessof a wide area in this portion, thereby causing dishing to be formed inthe region. As set out above, the provision of the lattice-shaped wirescan avoid the formation of such a recess as mentioned above.

The second-layer wires can be formed in the following manner. Afterformation of an approximately 1000 nm thick silicon oxide film by theCVD method, the surface is polished by CMP, followed by attachment(deposition) of a 400 nm thick silicon oxide film by the CVD method.Thereafter, a photoresist is patterned, followed by dry etching to formthrough-holes which are 0.44 μm square. Next, after irradiation with UVLight, a composite film made of Ti/TiN films having thicknesses of40/100 nm, respectively, and a 500 nm thick W film is formed. The W filmin the surface portion is subjected to dry etching to form plugelectrodes inside the through-holes. Moreover, a metal layer made ofTi/Al—Cu/Ti/TiN films with thicknesses, for example, of 10/400/10/75 nm,respectively, is formed. The metal layer is patterned by a photoetchingprocess to form a second-layer wire M2. The second-layer wire M2 ispatterned to provide wires of the peripheral circuit portion and arepatterned, as shown in FIG. 77, in the memory mat portion to provideglobal data lines GD. The wire intervals of the selective transistorportions is, for example, 0.48 μm in the dock bone portion, and the wirepitch is, for example, 1.1 μm. In addition, the first through-holes 263at the selective transistor portion are alternately arranged.

Although the subsequent steps are not shown in the figures, there areformed an approximately 30 nm thick silicon oxide film, an about 300 nmthick SOG (spin-on-glass) film by the CVD method, followed by furtherformation of an approximately 300 nm thick silicon oxide film by the CVDmethod. Subsequently, there can be formed second through-holes which areabout 0.52 μm square, plug electrodes as formed before; and athird-layer wire M3, which is made of films of Ti/Al—Cu/Ti/TIN withthicknesses, for example, of 120/600/10/75 nm, respectively. Thethird-layer wire M3 is patterned to provide wires of the peripheralcircuit portion. The wire width is, for example, 0.7 μm, and theinterval is, for example, 0.8 μm.

As stated hereinabove, the AND-type flash memory of this embodiment is a256 MB flash memory adopting the multiple state logic memory system,enabling one to realize a large capacitance without increasing thephysical bit capacitance within the memory chip. Moreover, since ashallow element is adopted, the reliability of the AND-type flash memorycan be improved. In addition, tunnel currents for write and eraseoperations pass through the entire surfaces of the channel regions ofthe memory cells, with a prolonged element life and also with astructure suited for fineness. Additionally, in the fabrication steps,scattering of the exposed light is suppressed to improve the processingaccuracy. When ion implantation into and CMP of the memory cells areperformed, the peripheral circuit and the selective transistor portionsare covered with the built-up film including a silicon nitride film, sothat implant of an unnecessary impurity and damage to them by CPM isprevented, thus making it possible to fabricate a high-performanceAND-type flash memory and reduce the processing load with an increasingprocess margin.

(Embodiment 6)

FIG. 78 is a plan view showing an example of an AND-type flash memory ofEmbodiment 6 with respect to its memory cell region. The AND-type flashmemory of this embodiment includes buffer gate electrodes and selectivetransistors which are integrally formed together. Other arrangements aresimilar to those of Embodiment 5. Accordingly, only portions which aredifferent from those of Embodiment 5 will be described.

The AND-type flash memory of the embodiment has gate electrodes 600wherein a buffer gate electrode and a selective transistor areintegrally formed. In other words, the gate electrode 600 has astructure which is the same as the structure of a buffer gate electrodefrom the standpoint of a gate electrode structure, and simultaneouslyfunctions as a selective transistor.

FIG. 79 is a sectional view of the AND-type flash memory of thisembodiment. Since this memory is similar to that of Embodiment 5 exceptfor the portion having selective transistors SD, this feature is notillustrated herein.

FIGS. 80 and 81 are, respectively, sectional enlarged views of portion Dof FIG. 79. FIG. 80 is a sectional view taken along the line E—E of FIG.78, and FIG. 81 is a sectional view taken along the line F—F of FIG. 78.

As shown in FIG. 80, a gate electrode 600 having a similar arrangementas the buffer gate electrode 315 of Embodiment 5 is provided. However,as shown in FIG. 81, with the AND-type flash memory of the embodiment, adrain region extends below the gate electrode 600 and arrives at thelower portion of a gate insulating film 220 and a polysilicon film 223Accordingly, where an appropriate voltage is applied to the polysiliconfilm 223 and a WSi₂ film 224, a channel is formed between the drainregion 213 and an n-type low concentration semiconductor region 227,thus making it possible to function as a transistor. More particularly,there is formed a selective transistor SD wherein the lower region ofthe gate insulting film 220 and the polysilicon film 223 of the gateelectrode 600 is used as a channel region.

Next, the method of fabrication of the AND-type flash memory of thisembodiment will be described with reference to FIGS. 82 to 87. FIGS. 82to 87 are, respectively, plan or sectional views showing, in sequence,an example of the method of fabrication of the AND-type flash memory ofEmbodiment 6.

The method of fabrication of the AND-type flash memory of thisembodiment comprises steps similar to those steps up to FIG. 65 inEmbodiment 5.

Subsequently, although the removal of the interlayer insulating film219, and the second polysilicon film 218 and the first polysilicon film211 by a photoetching process is similar to that of Embodiment 5, asshown in FIG. 82, there is formed a pattern 610 at a lower side from theend of the drain region 213 which serves as a local data line 304(10).Thus, the end portion of the drain region 213 is formed in an entire lowregion of a floating gate electrode portion of the gate electrode.

As shown in FIG. 83, as illustrated with respect to Embodiment 5, a gateinsulating film 220, a polysilicon film 223, a WSi₂ film 224 and asilicon oxide film 225 are formed by the CVD method, followed bypatterning of the silicon oxide film 225, WSi₂ film 223 and siliconoxide film 225 in such a way as to form, like Embodiment 5, word lines301 (8) and a gate electrode 600 in the memory cell region and n-channelMISFET's Qn1, Qn2 and p-channel MISFET Qp in the peripheral circuitregion. In this patterning, as shown in FIG. 84, the pattern of the gateelectrode 600 is so formed as to be offset by a distance L from the endof the drain portions 304(10). In this arrangement, a channel lengthcorresponding to the distance L is formed.

As shown in FIG. 85, like the step of FIG. 73 of Embodiment 5, a siliconoxide film 225 is used as a mask, through which an interlayer insulatingfilm 219 and first and second polysilicon films are successively formed.In this step, there are formed selective transistors SD having the wordlines 301(8) and the gate electrodes 600.

Thereafter, as shown in FIG. 86, first-layer wires M1 are formed, likethe embodiment 5, and as shown in FIG. 87, second-layer wires M2 areformed like Embodiment 5. It will be noted that third-layer wires M3 mayalso be formed as in Embodiment 5.

According to the AND-type flash memory of this embodiment, the bufferelectrode cannot be formed individually, and thus, a corresponding areacan be saved, resulting in a high degree of integration of the AND-typeflash memory.

(Embodiment 7)

FIGS. 88 to 99 are, respectively, sectional or plan views showing, insequence, an example of a method of fabricating an AND flash memoryaccording to Embodiment 7 of the invention.

Like Embodiment 5, element isolation regions 204 are formed in the mainsurface of a semiconductor substrate 201, and p-type and n-type wellregions 206 to 208 are formed. Thereafter, the main surface of thesemiconductor substrate 1 is oxidized to form an about 25 nm thick gateinsulating film 224, after which, as shown in FIG. 88, regions where ann-channel MISFET Qn1 and p-channel MISFET TQp are to be formed arecovered with a photomask 205, followed by removal of the gate insulatingfilm 220 on the main surface of the semiconductor substrate 1 byetching. Next, a gate insulating film 210, whose thickness is smallerthan that of the gate insulating film 220, is formed on the main surfaceof the semiconductor substrate 201.

As shown in FIG. 89, the photomask 205 is removed, followed by formationof a polysilicon film 211 and a silicon oxide film 700 as in Embodiment5 and also a silicon nitride film 212 in the same manner as inEmbodiment 5. Thereafter, the silicon nitride film 212, silicon oxidefilm 700 and polysilicon film 211 are so patterned as to provide gateelectrodes of the n-channel MISFET Qn1 and the p-channel MISFET TQp.Using the photoresist film and the silicon nitride film 212 as a mask,there are formed low concentration semiconductor regions 239, 240 of then-channel MISFET Qn1 and the p-channel MISFET TQp by an ion implantationmethod. After removal of the photoresist film, an impurity isextensively diffused at high temperatures. With the thermal treatment ofthe low concentration semiconductor regions 239, 240 at hightemperatures, there can be formed a high withstand voltage MISFET. Then,the silicon nitride film 212, silicon oxide film 700 and polysiliconfilm 211 are so patterned as to provide first floating gate electrodesof the memory cell region, followed by formation of low concentrationsemiconductor regions 213 of the memory cells by an ion implantationmethod using the photoresist film and the silicon nitride film 212 as amask. Thereafter, side wall spacers 214 are formed on the side surfacesof the silicon nitride film 212, silicon oxide film 700 and polysiliconfilm 211. Using the photoresist film, silicon nitride film 212 and theside wall spacers 214 as a mask, high concentration semiconductorregions 241, 242 of the n-channel MISFET Qn1 and the p-channel MISFETTQp and a high concentration semiconductor region 215 of the memorycells are formed by an ion implantation method.

Next, as shown in FIG. 90, a silicon oxide film 216 is formed in thesame manner as in Embodiment 5. As shown in FIG. 91, the silicon nitridefilm 212 is removed as in Embodiment 5. At this time, the siliconnitride film 212 is removed with hot phosphoric acid, so that thesilicon oxide film 700 is left on the polysilicon film 211, Next, asshown in FIG. 92, a photoresist film 701 is formed on the n-channelMISFET Qn1 and the p-channel MISFET TQp, and the silicon oxide film onthe other region is removed by etching. Moreover, as shown in FIG. 93, apolysilicon film 218 is formed as in Embodiment 5, and is so patternedas to provide second floating gate electrodes, like Embodiment 5.

An interlayer insulating film 219 is formed as in Embodiment 5, and aphotoresist film 702 is formed. Using this film as a mask, openings 217are formed in the interlayer insulating film 219 in regions where a gateelectrode of the n-channel MISFET Qn2 is to be formed and a gateelectrode of the selective transistor SD is to be formed. The shape ofthe thus formed openings, which is exemplified as an opening on theselective transistor SD, is as shown in the plan view of FIG. 95. Inthis case, the opening is made in the form of a slit; however, theinvention is not limited to this, but may provide an opening in the formof a bole or in a form where holes are aligned.

Next, as shown in FIG. 96, a polysilicon film 223 and WSi₂ film 224, anda silicon oxide film 225 as in Embodiment 5 are successively formed.Further, as shown in FIG. 97, the silicon oxide film 225, WSi₂ film 224,polysilicon film 223, interlayer insulating film 219, polysilicon film218 and polysilicon film 211 are patterned in the same manner as inEmbodiment 5. The plan view of the word lines 301(8) and the gateelectrode 312 of the selective transistor SD after the patterning isshown in FIG. 98. At this stage, the peripheral circuit region is sopatterned as to form a gate electrode of the n-channel MISFET Qn2, andno resist pattern is formed on the n-channel MISFET Qn1, and no resistpattern is formed on the n-channel MISFET Qn1 and the p-channel MISFETTQp. However, since the silicon oxide film 700 is formed on the gateelectrodes of the n-channel MISFET Qn1 and the p-channel MISFET TQp,this serves as a mask and the gate electrodes are not etched. Inaddition, no buffer gate electrode is formed between the selectivetransistors SD and the memory cells. This is because the gate electrodeof the selective transistor SD is constituted of the silicon oxide film225, WSi₂ film, 224, polysilicon film 223, interlayer insulating film219, polysilicon film 218 and polysilicon film 211, and it is notnecessary to provide a buffer gate electrode. This enables one to savean area of memory cells and realize a high degree of integration. Inthis manner, the gate electrodes of the memory cells, the selectivetransistors SD and the n-channel MISFET Qn2 are formed. The gateelectrodes of the selective transistors SD and the n-channel MISFET Qn2are constituted of the WSi₂ film 224, polysilicon film 223, polysiliconfilm 218 and polysilicon film 211 wherein the polysilicon film 223 andthe polysilicon film 218 are connected through the opening 217 formed inthe interlayer insulating film 219. Thus, since the gate electrode ismade of multiple layers and is provided with the SiW₂ film of lowresistivity, so that the resistance of the gate electrode is reducedwith an improved response speed, the performance of the AND-type flashmemory is improved.

Next, as shown in FIG. 99, an n-type low concentration semiconductorregion 227 and punch-through stopper regions 228 are formed, likeEmbodiment 5, and side wall spacers 230 are formed, after which ann-type high concentration semiconductor region 232 is formed.

The subsequent steps are substantially similar to those of Embodiments 5and 6 and their illustration is omitted.

According to the method of fabricating the AND-type flash memory of thisembodiment, the semiconductor regions, which are source/drain regions ofthe n-channel MISFET Qn1 and the p-channel MISFET TQp of the peripheralcircuit, are formed prior to the formation of memory cells, so that hightemperature thermal treatment is possible. Thus, the n-channel MISFETQn1 and the p-channel MISFET TQp can be applied to the high withstandvoltage transistors. On the other hand, high temperature thermaltreatment is not carried out on the memory cells after the formation ofthe semiconductor regions for the source/drain regions, and thesemiconductor regions are formed in a shallow junction, therebyproviding a MISFET having an excellent punch-through resistance. In theAND-type flash memory of the embodiment, it is not necessary to providea buffer gate electrode, so that the area occupied by the memory cellscan be reduced with a high degree of integration. Moreover, theresistance values of the gate electrodes of the n-channel MISFET Qn2 andthe selective transistor SD can be reduced to improve the performance ofthe AND-type flash memory.

(Embodiment 8)

FIGS. 100 to 104 are, respectively, sectional views showing an exampleof an embodiment of the invention, in which a non-volatile memoryelement alone is shown. The MOS transistor used in a peripheral circuitis omitted in order to prevent the drawings from being too complicated.

As shown in FIG. 100, a 100 nm thick thermally oxidized film 802 isformed on a p-type silicon substrate 801, followed by successivedeposition of a 100 nm thick, n-type or non-doped polysilicon film 803and a 150 nm thick, non-doped silicon oxide film 804. It will be notedthat the p-type silicon substrate may be replaced by an n-type siliconsubstrate which is formed with a p-type well region in the region shownin this section view.

FIG. 101 shows the next step in the fabrication from the step of FIG.100. The polysilicon film 803 and the silicon oxide film 804 are dividedinto sections as shown in FIG. 101 by use of photolithographic and dryetching techniques to provide first floating gate electrodes. After theseparation, n-type ions are implanted through the mask of the firstfloating gates to form n-type semiconductor regions 805 in the surfaceof the p-type silicon substrate 801. The implantation is performed atabout 1×10¹⁵ atoms/cm² at an acceleration energy of 40 keV, and may bechanged depending on the desired element structure and elementcharacteristics. A 150 nm thick silicon oxide film is deposited over theentire surface, and side wall spacers 806 are formed on the side wallsof the floating gate electrodes by use of anisotropic dry etching.

FIG. 102 shows further processing subsequent to the step of FIG. 101.Using an anistropic dry etching technique, grooves are formed in thep-type semiconductor substrate 801 through a mask of the first floatinggate electrodes made of the polysilicon film 803 and the silicon oxidefilm 804 and the side wall spacers 806. In this embodiment, the depth is300 nm and may be changed depending on the element isolationcharacteristic. A 5 nm thick thermally oxidized film 807 formed atapproximately 800° C. is formed on the silicon surfaces exposed in thegrooves, and a non-doped silicon oxide film 808 is deposited over theentire surface to a thickness of 10 nm. This silicon oxide film 808serves as a barrier for preventing diffusion of an impurity contained inBPSG into the p-type silicon substrate 801 and the n-type semiconductorregions 805. After the deposition of the silicon oxide film 808, a BPSGfilm 809 is deposited on the entire surface to a thickness of 500 nm.The spaces between the elements are filled by use of the fluidity of theBPSG, followed by treatment in an atmosphere of nitrogen at 850° C. inorder to planarize the surface and remove the line of junctures andcavities FIG. 102 is a view after the thermal treatment forplanarization.

FIG. 103 is a view showing processing which further proceeds from thestage of FIG. 102. The BPSG film 809 deposited on the entire surface isuniformly retarded by dry etching until the polysilicon film 803 isexposed. Immediately after this, treatment in an atmosphere of ammoniaat 800° C. for 20 minutes is performed in order to obtain the effectsdescribed with reference to FIGS. 110 and 111.

Next, as shown in FIG. 104, the exposed surface is cleansed withhydrofluoric acid, and a 50 nm thick n-type polysilicon film 810 isdeposited, followed by processing into the shape of a second floatinggate electrode by use of photolithographic and dry etching techniques.It will be noted that the polysilicon film 810 is formed for the purposeof increasing the surface area of the floating gate electrode. Thepolysilicon film 810 is in contact with the polysilicon film 803 servingas the first floating gate electrode without interposing an insulatingfilm therebetween. After the formation of the polysilicon film 810, a 20nm thick silicon oxide film 811 is deposited. Further, a 100 nm thickn-type polysilicon 812 is further deposited. This polysilicon film 812is patterned to provide control gate electrodes. When a voltage isapplied to the polysilicon film 812 serving as a control gate electrode,the voltage is also applied to the first floating gate electrode 103 viathe polysilicon film 810 serving as the second floating gate electrode.It will be noted the principle of operation of this element is, forexample, similar to that of Embodiments 1 to 7. The BPSG film 809 ofthis embodiment may be, of course, used as an insulating film polishedby the CMP method in Embodiments 1 to 7.

(Embodiment 9)

FIGS. 105 to 109 are, respectively, sectional views showing an exampleof another embodiment of the invention wherein a non-volatile memoryelement alone is shown. As shown in FIG. 105, 300 nm thick elementisolation regions 902 are formed on a p-type silicon substrate 901 bythermal oxidation A 10 nm thick thermally oxidized film 903 is thenformed, followed by successive deposition of a 100 nm thick, n-type ornon-doped polysilicon film 904 and a 150 nm thick non-doped siliconoxide film 905. It will be noted that the silicon substrate 901 may bereplaced by an n-type silicon substrate wherein a p-type well region isformed in the region shown in this sectional view.

FIG. 106 is a view showing the fabrication which proceeds from FIG. 105.The polysilicon film 904 and the silicon oxide film 905 are divided intosections, as shown in FIG. 106, by photolithographic and dry etchingtechniques to provide first floating gate electrodes After the division,n-type ions are implanted through the mask of the first floating gateelectrodes to form n-type semiconductor regions 906 in the surface ofthe silicon substrate 901. The implantation is carried out atapproximately 1×10¹⁵ atoms/cm² under an acceleration energy of 40 keVand may be changed depending on the intended element structure andcharacteristics. A 150 nm thick silicon oxide film is deposited over theentire surface and is subjected to anistropic dry etching to form sidewall spacers 907 on side walls of the first floating gate electrodes.

FIG. 107 is a view showing a processing which proceeds from the state ofFIG. 106. A non-doped silicon oxide film 908 is deposited over theentire surface to a thickness of 100 nm. The silicon oxide film 908serves as a barrier for preventing diffusion of an impurity containedBPSG into the n-type semiconductor regions 906 and the silicon substrate901. After the deposition of the silicon oxide film 908, a BPSG film 909is deposited over the entire surface to a thickness of 500 nm. Spacesbetween the elements are filled by use of the fluidity of BPSG, andtreatment in an atmosphere of nitrogen at 850° C. is carried out inorder to planarize the surface and remove the lines of juncture andcavities. FIG. 107 is a view after the thermal treatment forplanarization.

FIG. 108 is a view showing processing which further proceeds from thestate of FIG. 107. The BPSG film 909 deposited over the entire surfaceis uniformly retarded by dry etching until the polysilicon 904 isexposed. Immediately after this, nitriding treatment in an atmosphere ofammonia at 800° C. for 20 minutes is performed in order to obtain theeffects described with reference to FIGS. 110 and 111.

FIG. 109 is a view showing processing which further proceeds from thestate of FIG. 108. After the entire surface is cleansed withhydrofluoric acid, a 50 nm thick n-type polysilicon film 910 isdeposited, followed by processing the film into the shape of a secondfloating gate electrode by use of photolithographic and dry etchingtechniques. It will be noted that the polysilicon film 910 is formed forthe purpose of increasing the surface area of the floating gateelectrode. The polysilicon film 910 is in contact with the polysiliconfilm 904 without interposing an insulating film therebetween. After theformation of the polysilicon film 910, a 20 nm thick silicon oxide film911 is deposited. Further, a 100 nm thick n-type polysilicon 912 isfurther deposited. This polysilicon film 912 is patterned to providecontrol gate electrodes. When a voltage is applied to the polysiliconfilm 912, the voltage is also applied to the polysilicon film 904 viathe silicon oxide film 911. It will be noted the operation principle ofthis element is, for example, similar to that of Embodiments 1 to 7.

(Embodiment 10)

In Embodiments 1 to 9, various applications of the invention to AND-typeflash memories has been described. In this embodiment 10, a case wherethe invention is applied to a NOR-type flash memory is considered. Itshould be noted that a NOR-type flash memory is described, for example,in U.S. Pat. No. 5,472,891.

As for the fabrication method, Embodiment 1 calls for forming asource/drain region into which an impurity is introduced self-alignedlyrelative to a column pattern. Embodiment 10 differs from this techniquein that the source/drain regions are formed after the formation ofcontrol gate electrodes (word lines), and subsequently, source lines anddata lines are formed which are electrically connected to thesource/drain line regions.

FIG. 112 is a circuit diagram showing an essential part of the NOR-typeflash memory of this embodiment, and FIG. 113 is a plan layout of theNOR-type flash memory of this embodiment, while FIG. 114A is a sectionalview taken along the taken along the line A—A of FIG. 113, and FIG.114(B) is a sectional view taken along the line B—B of FIG. 113.

MISFET constituting the peripheral circuit is similar to that ofEmbodiments 1 to 9 and its illustration is omitted.

Word lines WL, which are formed integrally with control gates 8, 301 ofmemory cells M, and source lines are arranged to extend in the columndirection (a direction of the word lines), and data lines DL and elementisolation regions 5, 305 are arranged to extend in the column direction(a direction of data lines) vertical to the row line.

Memory cells M are positioned at intersections between the word lines,and source lines SL and the data lines DL are formed on the upperportion of the memory cells M. The data lines DL are electricallyconnected to the drain regions 10 of the memory cells M, and the sourcelines SL are electrically connected to the source regions of the memorycells M.

The memory cell M is constituted of a MISFET, and the memory cells Madjacent in the row direct-ion are isolated with isolation regions 5,305. The isolation regions 5, 305 have a shallow isolation structure asin Embodiment 1. The memory cell M is formed in a p-type well region 208formed in a p-type semiconductor substrate 1, 201, and the p-type wellregion 208 is surrounded by an N-type well and isolated from the p-typesemiconductor substrate 1, 201.

The memory cell M is constituted of a gate insulating film 2 formed onthe main surface of the semiconductor substrate 1, 201, a first floatinggate electrode 3 formed on the gate insulating film 2, a second floatinggate electrode 7 formed on the first floating gate electrode 3, aninterlayer insulating film 15 formed on the second floating gateelectrode 7, a control gate electrode 8 formed on the interlayerinsulating film 15, a pair of N-type semiconductor regions 10, 11 formedwithin the semiconductor substrate 1, 201 and serving as source/drainregions, and a p-type well region 8 which consists of a channel regionlocated between the drain region 10 and the source region 11 and belowthe first floating gate electrode 3. More particularly, the channelregion is arranged between the drain region 10 and the source region 11in the column direction.

The source line SL is formed self-alignedly relative to the side wallspacer 20 formed on side walls of the first and second floating gateelectrode 3, 7, control gate electrode 8 and insulating film 17 and iselectrically connected to the source region 11 of the memory cell M.

The interlayer insulating film 128 is formed on the upper portion of thesource line SL, and the data line DL formed on the upper portion of theinterlayer insulating film 128 is electrically connected to the drainregion 10 of the memory cell M via a contact hole formed in theinterlayer insulating film 128.

The side wall spacers 3 are formed on the side walls of the firstfloating gate electrodes 3, and grooves 117 are formed self-alignedly tothe side wall spacers 3

An insulating film 5, 305 is buried in the groove 117, and the surfacepositions of the insulating film 5, 305 are so planarized as to besubstantially uniform between the first floating gate electrodes 3 andwithin the memory cell portion.

The grooves 117 and the insulating film 5, 305 buried in the grooves 117permit shallow isolation regions to be formed.

The second floating gate electrode 7 is formed to extend on theinsulating film 5, 305, thereby increasing the capacitance between thecontrol gate electrode 8 and the second floating gate electrode 7.

In this manner, the grooves 117 are formed self-alignedly to the sidewall spacers 3, so that the distance of the memory cells in the rowdirection can be reduced with a reduction in cell size, thus ensuring ahigh degree of integration.

Like Embodiment 1, a p-type semiconductor region acting as a channelstopper may be formed below the groove 117.

Referring now to FIGS. 115A to 121, the method of fabricating theNOR-type flash memory will be briefly described. FIGS. 115A, 115B, 117A,117B, 119A and 119B are, respectively, sectional views showing, insequence, an example of the method of fabrication of the NOR-type flashmemory, wherein FIGS. 115A, 117A and 119A are sectional views takenalong the line A—A of FIG. 113 and FIGS. 115B, 117B and 119B aresectional views taken along the line B—B of FIG. 113. FIGS. 116, 118 and120 are, respectively, plan views showing, in sequence, an example ofthe method of fabrication of the NOR flash memory.

As shown in FIGS. 115A, 115B and 116, like Embodiment 1, there areformed a gate insulating film 2 on the main surface of a semiconductorsubstrate 1, 201, a first polysilicon film 111 on the first gateinsulating film 2, and a silicon nitride film 113, which is aninsulating film, on the first polysilicon film 111. Thereafter, thefirst polysilicon film 111 and the insulating film 113 are patterned byetching to form a striped column pattern extending in the columndirection. The patterning defines a gate width of the memory cell M(first floating gate electrode 3). Although not shown in the figures,like Embodiment 1, the peripheral circuit portion is covered with thefirst polysilicon film 11 and the silicon nitride film 113.

Next, side wall spacers 4, 116 are formed.

As shown in FIGS. 117A, 117B and 118, grooves 117 are formedself-alignedly relative to the side wall spacers 4, 116 by etching,after which an insulating film 119′ deposited over the entire surface ofthe substrate is polished by the CMP method to form an insulating film5, 305, 119 planarized to the insulating film 113.

Next, after the removal of the insulating film 113, a second polysiliconfilm 120 is deposited. The second polysilicon film 120 is subsequentlypatterned by etching to form a second pattern extending in the columndirection. The length of the second floating gate electrode along therow direction is defined by this patterning.

Next, as shown in FIGS. 119A, 119B and 120, after formation of aninterlayer insulating film 14, 121 like Embodiment 1, a thirdpolysilicon film 122, a WSi film 123 and an insulating film 124 aresuccessively deposited.

The insulating film 124, WSi film 123, third polysilicon film 122,interlayer insulating film 15, 121, second polysilicon film 120 andfirst polysilicon film 111 are patterned by etching to form word lines(control gate electrodes) 8, 301 made of the WSi film 123 and the thirdpolysilicon film 122 and floating gate electrodes 3, 7 made of the firstpolysilicon film 111 and the second polysilicon film 120. The firstfloating gate electrode 3 is constituted of the first polysilicon film111, and the second floating gate electrode 7 is constituted of thesecond polysilicon film 120. The word lines control gate electrodes) 8,301 are so patterned as to extend in the row direction and areintegrally formed with control gate electrodes 8 of the memory cellsarranged in the row direction.

Thereafter, an impurity is introduced self-alignedly to the insulatingfilm 124 to form a pair of N-type semiconductor regions which result ina drain region 10 and a source region 11. A side wall spacer 20 isformed on side walls of the insulating film 124, WSi film 123, thirdpolysilicon film 122, interlayer insulating film 15, 121, secondpolysilicon film 120 and first polysilicon film 111.

Then, as shown in FIGS. 114 and 120, a conductive film is deposited,after which the conductive film is patterned by etching to form sourcelines electrically connected to the source regions of the memory cellsM. The conductive film is constituted, for example, of animpurity-introduced polysilicon film or a metal film such as a W film orthe like.

After the formation of an interlayer insulating film 128, contact holes306 are formed, and data lines DL electrically connected to the drainregions 10 of the memory cells M via the contact holes 306 are formed.The data lines are constituted, for example, of a metal film such as anAl film.

In Embodiment 10, the planarization of the insulating films 5, 305, 119is effected by CMP, but CMP and etching may be used as described inEmbodiment 5.

Moreover, in Embodiment 10, the planarized insulating films 5, 305, 119are formed in the grooves 117, which have been formed self-alignedly tothe side wall spacers 4, 116, which should not be construed as limitingthereto. It is a matter of course to arrange this as set out inEmbodiment 5.

In Embodiment 10, the grooves 117 are formed self-alignedly to the sidewall spacers 4, 11. In this connection, as shown in FIG. 121, the groove117 is formed by etching by use of a mask of the insulating film made ofa silicon nitride film, after which, as shown in FIG. 122, theplanarized insulating film 5, 305, 119 may be filled in the groove 117.Of course, the second floating gate electrode 7 is formed as extendingover the insulating film 5, 305, 119.

In this arrangement, the intervals of the memory cells M along the rowdirection can be reduced, and since the size can be reduced, a higherdegree of integration is possible.

In Embodiment 10, if source lines SL and data lines DL are not provided,the source regions and the drain regions of the memory cells M areconnected in series, so that there can be formed a so-called NAND-typememory. In this case, it is sufficient to provide a selective MISFET,like Embodiments 1 to 9.

The invention has been particularly described based on embodiments ofthe invention, and the invention should not be construed as beinglimited to these embodiments. Many variations and alterations withoutdeparting from the spirit of the invention may be possible.

As stated hereinbefore, the non-volatile semiconductor memory and itsfabrication method, and the semiconductor device and its fabricationmethod, according to the invention, are suited for fine processing and ahigh degree of integration and have high reliability, and areparticularly suitable for application to an AND-type flash memory.

1. A method of manufacturing a semiconductor device, comprising stepsof: (a) providing a semiconductor substrate with a first insulating filmover a memory cell forming region, with a second insulating film formedover a peripheral circuit region, with first conductor patterns formedover said first insulating film and said second insulating film, andwith grooves formed into said semiconductor substrate, in self-alignmentwith said first conductor patterns, at said memory cell forming regionand at said peripheral circuit region, such that said grooves serve asan element isolation region in said memory cell forming region and insaid peripheral circuit region, wherein said second insulating film hasa thickness greater than that of said first insulating film; (b) fillingthird insulating films in said grooves at said memory cell formingregion and at said peripheral circuit region by polishing an insulatingfilm deposited over said memory cell forming region and said peripheralcircuit region; (c) after said step (b), forming second conductorpatterns over said first conductor patterns; (d) forming a fourthinsulating film over said first conductor patterns; (e) forming aconductive film over said fourth insulating film; and (f) patterningsaid conductive film, said second conductor patterns and said firstconductor patterns in said memory cell forming region and in saidperipheral circuit region, wherein, in said step (f), said conductivefilm in said memory cell forming region is patterned to form a controlgate electrode of a memory cell, wherein, in said step (f), said firstconductor patterns and said second conductor patterns in said memorycell forming region are patterned to form a floating gate electrode ofsaid memory cell, and wherein, in said step (f), said conductive film,said first conductor patterns and said second conductor patterns in saidperipheral circuit region are patterned to form a gate electrode of aMISFET of said peripheral circuit region.
 2. A method of manufacturing asemiconductor device according to claim 1, wherein said second conductorpatterns are formed to extend over said third insulating films.
 3. Amethod of manufacturing a semiconductor device, comprising steps of: (a)providing a semiconductor substrate with a first insulating film over amemory cell forming region, with a second insulating film formed over aperipheral circuit region, and with first conductor patterns formed oversaid first insulating film and said second insulating film, wherein saidsecond insulating film has a thickness greater than that of said firstinsulating film; (b) forming grooves into said semiconductor substrate,in self-alignment with said first conductor patterns, at said memorycell forming region and at said peripheral circuit region, such thatsaid grooves serve as an element isolation region in said memory cellforming region and in said peripheral circuit region; (c) filling thirdinsulating films in said grooves at said memory cell forming region andat said peripheral circuit region by polishing an insulating filmdeposited over said memory cell forming region and said peripheralcircuit region; (d) after said step (c), forming second conductorpatterns over said first conductor patterns; (e) forming a fourthinsulating film over said first conductor patterns; (f) forming aconductive film over said fourth insulating film; and (g) patterningsaid conductive film, said second conductor patterns and said firstconductor patterns in said memory cell forming region and in saidperipheral circuit region, wherein, in said step (g), said conductivefilm in said memory cell forming region is patterned to form a controlgate electrode of a memory cell, wherein, in said step (g), said firstconductor patterns and said second conductor patterns in said memorycell forming region are patterned to form a floating gate electrode ofsaid memory cell, and wherein, in said step (g), said conductive film,said first conductor patterns and said second conductor patterns in saidperipheral circuit region are patterned to form a gate electrode of aMISFET of said peripheral circuit region.
 4. A method of manufacturing asemiconductor device according to claim 3, wherein said second conductorpatterns are formed to extend over said third insulating films.
 5. Amethod of manufacturing a semiconductor device, comprising steps of: (a)providing a semiconductor substrate with a first insulating film over amemory cell forming region, with a second insulating film formed over aperipheral circuit region, with first conductor patterns formed oversaid first insulating film and said second insulating film, and withgrooves formed into said semiconductor substrate, in self-alignment withsaid first conductor patterns, at said memory cell forming region and atsaid peripheral circuit region, such that said grooves serve as anelement isolation region in said memory cell forming region and in saidperipheral circuit region, wherein said second insulating film has athickness greater than that of said first insulating film; (b) fillingthird insulating films in said grooves at said memory cell formingregion and at said peripheral circuit region by polishing an insulatingfilm deposited over said memory cell forming region and said peripheralcircuit region; (c) after said step (b), forming second conductorpatterns at said memory cell forming region and at said peripheralcircuit region; (d) forming a fourth insulating film over said firstconductor patterns; (e) forming a conductive film over said fourthinsulating film; and (f) patterning said conductive film, and saidsecond conductor patterns in said memory cell forming region and in saidperipheral circuit region, wherein, in said step (f), said conductivefilm in said memory cell forming region is patterned to form a controlgate electrode of a memory cell, wherein, in said step (f), said secondconductor patterns in said memory cell forming region are patterned toform a floating gate electrode of said memory cell, and wherein, in saidstep (f), said conductive film and said second conductor patterns insaid peripheral circuit region are patterned to form a gate electrode ofa MISFET of said peripheral circuit region.
 6. A method of manufacturinga semiconductor device according to claim 5, wherein said secondconductor patterns are formed to extend over said third insulatingfilms.
 7. A method of manufacturing a semiconductor device according toclaim 1, wherein, in said step (a), a silicon nitride film is formedover each of said first conductor patterns, wherein, in said step (b),said silicon nitride film serves as a stopper layer in said polishing,and wherein, before said step (c), said silicon nitride film is removed.8. A method of manufacturing a semiconductor device according to claim3, wherein, in said step (a), a silicon nitride film is formed over eachof said first conductor patterns, wherein in said step (c), said siliconnitride film serves as a stopper layer in said polishing, and wherein,before said step (d), said silicon nitride film is removed.
 9. A methodof manufacturing a semiconductor device according to claim 5, wherein,in step (a), a silicon nitride film is formed over each of said firstconductor patterns, wherein, in said step (b), said silicon nitride filmserves as a stopper layer in said polishing, and wherein, before saidstep (c), said silicon nitride film is removed.